X-Ray Study of Mechanical Properties of TiN Films Coated on Steel by Ion Beam Mixing(Thin Films)

概要

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The titanium nitride (TiN) films with the thickness of 0.5, 1.0, 2.0μm were coated on a steel substrate by the ion beam mixing method. The film had a strong fiber texture with <110> axis perpendicular to the film surface. The initial residual stresses are equi-biaxial compression between -4200 to -5500MPa. For all thickness cases, the initial part of the changes of the in-plane stresses in the film due to external tensile loading agreed well with the prediction based on elasticity. While the substrate is under uniaxial stresses, the film was in the biaxial state of stress because of the mismatch of Poisson's ratio. When the measured stress in the film exceeds a certain value, the stress departs from the linear relation and levels off. The onset of nonlinearity is coincident with the first appearance of cracks. The stresses at the onset of nonlinearity and leveling-off decrease with increasing film thickness. The ratio of Young's modulus between loading and unloading decreases as the film thickness increases, suggesting the increasing disjointed area.
一般社団法人日本機械学会の論文
2001-10-20