OS4(P)-21(OS04W0452) X-Ray Study of Mechanical Properties of TiN Thin Films with <001> Fiber Texture
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概要
- 論文の詳細を見る
- 一般社団法人日本機械学会の論文
- 2003-09-09
著者
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Akiniwa Yoshiaki
Dept. Of Mechanical Engineering Nagoya Univ.
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Miki Y
Nara Prefectural Inst. Of Industrial Tech.
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Miki Yasuhiro
Nara Prefectural Institute Of Industrial Technology
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Tanaka Keisuke
Dept. of Mechanical Engineering, Nagoya Univ.
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Ito Toshimasa
Denso Corporation Kariya
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Tanaka Keisuke
Dept. Of Mechanical Engineering Nagoya Univ.
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Kawai Masanori
Graduate School Of Mechanical Engineering Nagoya Univ.
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MIKI Yasuhiro
Nara Prefectural Inst. of Industrial Tech.
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