As-Grown Superconductivity of BiSrCaCuO Thin Films Prepared by Magnetron Sputtering with Three Targets: Bi_<2+a>(SrCa)_2Cu_3O_x, Bi_2(SrCa)_<2+b>Cu_3O_x and Bi_2(SrCa)_2Cu_<3+c>O_x (a = b = 1, c = 1.5)
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概要
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Superconducting BiSrCaCuO thin films were grown on MgO(100) substrates by magnetron sputtering with three targets. In order to precisely control the chemical composition of the metal elements, these three targets were simultaneously discharged; the heated (650℃) substrate was rotated above these targets. The superconducting transition temperature (zero resistivity) was 75 K in the as-grown state for the optimized sample. From the X-ray diffraction, The c-axis of the film was highly oriented normal to the substrate. The surface of the film was much smoother than that of the film grown with a single target.
- 社団法人応用物理学会の論文
- 1989-04-20
著者
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Kojima Kenzo
Department Of Electronic Engineering Faculty Of Engineering Aichi Institute Of Technology
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Kuroda Kenji
Faculty Of Engineering The University Of Tokushima
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Kojima Kenichi
Graduate School Of Integrated Science Yokohama City University
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Kojima K
Department Of Electronic Engineering Faculty Of Engineering Aichi Institute Of Technology
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TANIOKU Masami
Central Research Laboratory, Mitsubishi Electric Corporation
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Tanioku Masami
Central Research Laboratory Mitsubishi Electric Corporation
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Kojima Kazuyoshi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kojima Kazuyoshi
Central Research Laboratory Mitsubishi Electric Corporation
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HAMANAKA Kenjiro
Tsukuba Research Laboratory, Nippon Sheet Glass Co., Ltd.
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Hamanaka K
Tsukuba Research Laboratory Nippon Sheet Glass Co. Ltd.
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Hamanaka Koichi
Central Research Laboratory Mitsubishi Electric Corporation
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