RF Performance of Diamond Surface-Channel Field-Effect Transistors(<Special Issue>Heterostructure Microelectronics with TWHM2003)
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概要
- 論文の詳細を見る
RF diamond FETs have been realized on a hydrogen-terminated diamond surface conductive layer. By utilizing the self-aligned gate fabrication process which is effective for the reduction of the parasitic resistance, the transconductance of diamond FETs has been greatly improved. Consequently, the high frequency operation of 22 GHz has been realized in 0.2 μm gate diamond MISFETs with a CaF_2 gate insulator. This value is the highest in diamond FETs and is comparable to the maximum value of SiC MESFETs at present.
- 社団法人電子情報通信学会の論文
- 2003-10-01
著者
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Kawarada Hiroshi
School Of Science And Engineering Waseda University
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Kawarada Hiroshi
School Of Science & Engineering Waseda University
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Miyamoto Shingo
School Of Science And Engineering Waseda University
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MATSUDAIRA Hiroki
School of Science and Engineering, Waseda University
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UMEZAWA Hitoshi
National Institute of Advanced Industrial Science and Technology (AIST)
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UMEZAWA Hitoshi
School of Science and Engineering
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ISHIZAKA Hiroaki
School of Science and Engineering
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SONG Kwang-Soup
School of Science and Engineering
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TACHIKI Minoru
School of Science and Engineering
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Kawarada H
School Of Science And Engineering Waseda University
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Tachiki Minoru
School Of Science And Engineering:crest Jst (japan Science And Technology Corporation)
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Takeuchi Daisuke
Energy Technology Research Institute National Institute Of Advanced Industrial Science And Technolog
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SONG Kwang-Soup
Waseda University, School of Science and Engineering
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Tachiki M
Energy Technology Research Institute National Institute Of Advanced Industrial Science And Technolog
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Umezawa H
Core Research For Evolutional Science And Technology (crest) Japan Science And Technology Corporatio
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Kawarada Hiroshi
Nanotechnology Research Center Waseda University
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Song Kwang-soup
Waseda University School Of Science And Engineering
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Ishizaka Hiroaki
School Of Science And Engineering:crest Jst (japan Science And Technology Corporation)
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Matsudaira Hiroki
School Of Science And Engineering:crest Jst (japan Science And Technology Corporation)
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Taniuchi Hirotada
School Of Science And Engineering Waseda University
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Umezawa Hitoshi
School Of Science And Engineering Waseda University:crest Jst (japan Science And Technology Corporation)
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