Effect of Atomic and Molecular Hydrogen Irradiation on Ge Surface Segregation during Si Molecular Beam Epitaxy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-09-15
著者
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Shimada Toshikazu
Electronics Research Laboratory Nissan Motor Co. Ltd.
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NAKAGAWA Kiyokazu
Center for Crystal Science and Technology, University of Yamanashi
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Kimura Yoshinobu
Central Research Laboratory Hitachi Ltd.
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Nishida Akio
Central Research Laboratory Hitachi Ltd.
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SHIMADA Toshikazu
Central Research Laboratory, Hitachi Ltd.
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NAKAGAWA Kiyokazu
Central Research Laboratory, Hitachi Ltd.
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Nakagawa Kenichi
Liquid Ctystal Laboratories Sharp Corporation
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Nakagawa K
Department Of Advanced Material Science Faculty Of Engineering Kagawa University
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Nishida A
Hitachi Ltd. Tokyo Jpn
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Shimada T
Presto Japan Science And Technology Corporation (jst) And Department Of Chemistry The University Of
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Nakagawa K
Center For Crystal Science And Technology University Of Yamanashi
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Shimada Toshikazu
Central Research Laboratory
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Nakagawa Kiyokazu
Central Research Laboratory Hitachi Ltd.
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Nakagawa Keisuke
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
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KIMURA Yoshinobu
Central Research Laboratory, Hitachi, Ltd.
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