Atomic-Layer Doping in Si_<1-x>Ge_x/Si/Si_<1-x>Ge_x Heterostructures by Two-Step Solid-Phase Epitaxy
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-04-30
著者
-
山口 滋
Department Of Physics School Of Science Tokai University
-
NAKAGAWA Kiyokazu
Center for Crystal Science and Technology, University of Yamanashi
-
Yamaguchi S
Hitachi Ltd. Tokyo Jpn
-
SUGII Nobuyuki
Central Research Laboratory, Hitachi, Ltd.
-
NAKAGAWA Kiyokazu
Central Research Laboratory, Hitachi Ltd.
-
YAMAGUCHI Shinya
Central Research Laboratory, Hitachi Ltd.
-
Yamaguchi Shinji
Department Of Electrical Engineering Suzuka Technical College
-
Yamaguchi Shigeo
High-tech Research Center Meiji University
-
Yamaguchi Shigeo
Department Of Physics Tokyo Metropolitan University
-
Yamaguchi Shigeo
Department Of Electronic Science And Engineering Kyoto University
-
Nakagawa Kenichi
Liquid Ctystal Laboratories Sharp Corporation
-
Nakagawa K
Department Of Advanced Material Science Faculty Of Engineering Kagawa University
-
Sugii N
Central Research Laboratory Hitachi Ltd.
-
Sugii Nobuyuki
Central Research Laboratory Hitachi Ltd.
-
Miyao M
Central Research Laborotory Hitachi Ltd.:(present Address)information Science And Electrical Enginee
-
Miyao Masanobu
Central Research Laboratory
-
Nakagawa K
Center For Crystal Science And Technology University Of Yamanashi
-
Nakagawa Kiyokazu
Central Research Laboratory Hitachi Ltd.
-
Nakagawa Keisuke
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
-
Yamaguchi Shinya
Central Research Laboratory Hitachi Ltd.
関連論文
- 101 レーザによるTi系合金の表面改質(表面改質)
- 328 YAGレーザによるTiAlの表面改質(レーザモニタリング)
- 444 レーザによる TiAl 金属間化合物の表面改質
- 401 TiAl金属間化合物のレーザ表面改質
- Optically Pumped Blue-Green Laser Operation Above Room-Temperature in Zn_Cd_Se-ZnS_Se_ Multiple Quantum Well Structures Grown by Metalorganic Molecular Beam Epitaxy
- 25pYK-3 ジクロロベンゼン分子の電子遷移強度解析
- YAGレーザ第5高調波によるサファイヤの微細加工
- Strain Relaxation and Induced Defects in SiGe Thin Films Grown on Ion-Implanted Si Substrates
- Enhancement of Strain Relaxation of SiGe Thin Layers by Pre-Ion-Implantation into Si Substrates
- 「時間分解レーザー計測の最近の進展」解説小特集号によせて
- テラワット2サイクルパルスの発生と高次高調波変換
- CS-4-1 レーザを用いた微量ガス計測技術(CS-4.波長域が広がるレーザ技術とその応用〜「新波長レーザ」のシーズとニーズの融合に向けて〜,シンポジウムセッション)
- 高機能レーザー光源のガスセンシングへの応用 : 中赤外差周波光源を中心にして
- 「期待される波長可変中赤外レーザーデバイス」解説小特集号によせて
- レーザーブレイクダウンにより生じる水中マイクロバブル生成過程計測
- 分極反転デバイスによる中赤外光源を用いたガスモニタリング
- LAMP2006開催報告
- 「レーザーによる環境微量物質の計測」解説小特集号によせて
- 「燃焼・流体の先端研究におけるレーザーセンシング技術の動向」解説小特集号によせて
- Electronic Structure of Protonic Conductor SrTi_Sc_O_3 Probed by Soft-X-ray Spectroscopy
- Electronic Structure of Ce_Nd_xO_ Probed by Soft-X-Ray Spectroscopy
- Unoccupied Electronic State of SrTi_Nb_xO_3 Observed by Inverse-Photoemission Spectroscopy
- Evidence of O-H Bond in the Bulk State of Protonic Conductor Y-Doped SrCeO_3 by Soft-X-Ray Spectroscopy
- Band Structure of TiO_2-Doped Yttria-Stabilized Zirconia Probed by Soft-X-Ray Spectroscopy
- Ce-O Hybridization Effect of Protonic Conductor SrCe_Y_xO_ Observed by Resonant-Photoemission Spectroscopy
- Performance Comparison of Real-Time Laser Absorption Spectrometers for NH_3 Detection at 1.54 and 3.03μm in a H_2O Vapor Mixture
- Measurements of NO_2 Concentration with Wide Dynamic Range Based on Laser Absorption Spectroscopy Using a Multi-Pass Optical Cell : Effects of Ambient Temperature Change at the Optical Cell
- Parametric Studies on Improved Laser Cutting Performance of Magnesium Alloy with Two Flow Nozzles
- Trace Methane Detection Based on Raman Spectroscopy Using a High Finesse Optical Resonator
- Performance Characteristics of Power Build-Up Cavity for Raman Spectroscopic Measurement
- Yb Fiber Laser Pumped Mid-IR Source Based on Difference Frequency Generation and Its Application to Ammonia Detection
- レｰザｰ誘起蛍光法を用いた有機化学物質の検出
- Theoretical Analysis of a Radio Frequency Excited Slab CO_2 Laser
- レｰザｰ切断時のカｰフ内気流の観察
- 中赤外 Optical Multi-channel Analyzer の開発
- Spatially Resolved Gain Measurements of a Slab Type RF Excited CO_2 Laser
- 安定共振器を伴った不安定共振器
- 高速度撮影によるレーザー切断現象の研究
- レーザ焼入れに関する研究
- CO_2スラブ型レーザーの small signal gain 空間分布
- フォワードモードとバックワードモードが結合した共振器
- An Experimental Investigation of the Novel Unstable Resonator with a Stable Resonator Core
- レーザ切断におけるカーフ内気流の観察
- レーザ厚板切断におけるカーフ内流れの観察
- Microscopic Investigation of Al_Ga_N on Sapphire
- Anisotropic Dielectric Constants of Bi_2Sr_2(CaY_x)Cu_2O_(x=0.0,0.6)Single Crystals in 0.5-5.0 eV Region
- Effects of Ce Doping on Electronic Structures of Ln_Ce_xCuO_4 (Ln=Nd, Sm, Eu, Gd) Studied by Core-Level Photoemission Spectroscopy
- Valence States of Rare-Earth Ions in RERuSn_3 (RE=La, Ce, Pr, Nd, Sm) and Related Compounds Studied by Core-Level Photoemission Spectroscopy
- X-Ray Photoemission Spectroscopy of Nd_Ce_xCuO_4 and La_Sr_xCuO_4
- Optical Absorption of Gas Phase C_ and C_
- Introduction of Uniaxial Strain into Si/Ge Heterostructures by Selective Ion Implantation
- Development of Thin SiGe Relaxed Layers with High-Ge Composition by Ion Implantation Method and Application to Strained Ge Channels
- On Effects of Gate Bias on Hole Effective Mass and Mobility in Strained-Ge Channel Structures
- Thickness Dependence of Strain Field Distribution in SiGe Relaxed Buffer Layers
- Strain-Field Evaluation of Strain-Relaxed Thin SiGe Layers Fabricated by Ion Implantation Method
- Electroluminescence from Strained SiGe/Si Quantum Well Structures Grown by Solid Source Si Molecular Beam Epitaxy
- RF放電励起スラブ炭酸ガスレーザー媒質中の温度計測
- 半導体レーザー外部共振器による微量可燃性ガス検出に関する研究
- レーザー吸収分光用円筒型マルチパスセルの光学特性
- 円筒型マルチパスセルを用いた簡易型NO_2計測装置の研究
- レーザーを利用したダイオキシン検知
- Protonic Conduction in the Single Crystal of Sc-Doped SrZrO_3
- Ti-O Hybridization Effect of Lightly La-doped SrTiO_3 Observed by Resonant-Photoemission Spectroscopy
- Electronic Structure in the Bulk State of Protonic Conductor CaZrO_3 by Resonant Soft-X-Ray Emission Spectroscopy : Electrical Properties of Condensed Matter
- Reflection High Energy Electron Diffraction Intensity Oscillations during the Growth of ZnSe on Cleaved GaAs(110) Surface by Molecular Beam Epitaxy
- Two-Dimensional Simulation of and Experiments on the Forward-Backward Modes Coupled Unstable Resonator
- 中赤外における時間分解Optical Multi-channel Analyzerの開発
- The Effect of Isoelectronic In-Doping on the Structural and Optical Properties of (Al)GaN Grown by Metalorganic Vapor Phase Epitaxy
- Effect on GaN/Al_Ga_N and Al_Ga_N/Al_Ga_N Quantum Wells by Isoelectronic In-Doping during Metalorganic Vapor Phase Epitaxy
- Photoemission Study on Protonic Conductor CaZrO_3:Evidence of the Exchange Mechanism of Proton and Hole
- Transport Coefficients of Indium Antimonide in a Magnetic Field
- The Effect of Isoelectronic In-Doping on the Structural and Optical Properties of (Al)GaN Grown by Metal Organic Vapor Phase Epitaxy
- Mosaic Structure of Ternary Al_In_xN Films on GaN Grown by Metalorganic Vapor Phase Epitaxy
- Structural Properties of Al_In_xN Ternary Alloys on GaN Grown by Metalorganic Vapor Phase Epitaxy
- GaN Based Laser Diode with Focused Ion Beam Etched Mirrors
- Reduction of Etch Pit Density in Organometallic Vapor Phase Epitaxy-Grown GaN on Sapphire by Insertion of a Low-Temperature-Deposited Buffer Layer between High-Temperature-Grown GaN
- Electrical Properties of Bromine-Doped Nickel (Phthalocyanine) Films and Their Structural Change : Chemistry (incl. physical process)
- Metalorganic Vapor Phase Epitaxial Growth of High-Quality AlInN/AlGaN Multiple Layers on GaN : Semiconductors
- Electronic Transport Properties of ZrTiO_4 at High Temperature ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Electronic Structure of 4d Transition Metal Compound ZrF_4 by Resonant Photoemission Spectroscopy
- Ti-O Hybridization Effect of Nb-Doped SrTiO_3 by Resonant Photoemission Spectroscopy : Electrical Properties of Condensed Matter
- Optical Investigations of Solid-Phase Crystallization of Si_Ge_x
- Optical Investigations of Solid-Phase Crystallization (SPC) Properties of Si_Ge_X
- Atomic-Layer Doping in Si_Ge_x/Si/Si_Ge_x Heterostructures by Two-Step Solid-Phase Epitaxy
- Atomic-Layer Doping in Si_Ge_x/Si/Si_Ge_x Heterostructures by Two-Step Solid-Phase Epitaxy
- Ultrahigh Electron Mobilities in Si_Ge_x/Si/Si_Ge_x Heterostructures with Abrupt Interfaces Formed by Solid-Phase Epitaxy
- Theoretical Evaluation of Compositional Contrast of Scanning Electron Microscope Images
- Compatibility of Lithium Oxide Single Crystals with Tungsten Sputtered Films : The Effect of Passivation Films
- Compatibility of Lithium Titanite Fused Crystals with Nickel Foils
- An ESR Study of YBa_2Cu_3O_ and Y_2BaCuO_5 with Oxygen Deficiencies : Electrical Properties of Condensed Matter
- Construction of Electric-Field-Modulated Picosecond Time-Resolved Fluorescence Spectrometer
- Analysis of Charging Effect During Observation of Trench Structures by Seanrting Electron Microscope
- Simulation of Scanning Electron Microscope Image for Trench Structures
- 高繰り返しパルスファイバレーザーの開発
- Parametric Studies of a 13.56-MHz RF-Discharge-Pumped CO_2 Laser with Wide-Area Cylindrical Slab Geometry
- ネルンスト素子の候補としてのInSb熱電半導体の輸送係数
- 磁場中における熱電変換材料の輸送特性測定
- ペルチェ電流リード及び電流リード用傾斜機能材の提案
- Design Considerations of a RF-Pumped High-Power CO_2 Laser with a W-Axicon Type Optical Resonator
- 218206 小型ハイブリッドロケットの燃焼不安定に関する研究(一般04 熱力学・熱工学1)