Atomic-Layer Doping in Si_<1-x>Ge_x/Si/Si_<1-x>Ge_x Heterostructures by Two-Step Solid-Phase Epitaxy

スポンサーリンク

概要

• 論文の詳細を見る
• 1998-09-07

著者

• 山口 滋

  Department Of Physics School Of Science Tokai University

• NAKAGAWA Kiyokazu

  Center for Crystal Science and Technology, University of Yamanashi

• Yamaguchi S

  Hitachi Ltd. Tokyo Jpn

• SUGII Nobuyuki

  Central Research Laboratory, Hitachi, Ltd.

• NAKAGAWA Kiyokazu

  Central Research Laboratory, Hitachi Ltd.

• YAMAGUCHI Shinya

  Central Research Laboratory, Hitachi Ltd.

• Yamaguchi Shinji

  Department Of Electrical Engineering Suzuka Technical College

• Yamaguchi Shigeo

  High-tech Research Center Meiji University

• Yamaguchi Shigeo

  Department Of Physics Tokyo Metropolitan University

• Yamaguchi Shigeo

  Department Of Electronic Science And Engineering Kyoto University

• Nakagawa Kenichi

  Liquid Ctystal Laboratories Sharp Corporation

• Nakagawa K

  Department Of Advanced Material Science Faculty Of Engineering Kagawa University

• Sugii N

  Central Research Laboratory Hitachi Ltd.

• Sugii Nobuyuki

  Central Research Laboratory Hitachi Ltd.

• Miyao M

  Central Research Laborotory Hitachi Ltd.:(present Address)information Science And Electrical Enginee

• Miyao Masanobu

  Central Research Laboratory

• Nakagawa K

  Center For Crystal Science And Technology University Of Yamanashi

• Nakagawa Kiyokazu

  Central Research Laboratory Hitachi Ltd.

• Nakagawa Keisuke

  Department Of Applied Physics Faculty Of Science Science University Of Tokyo

• Yamaguchi Shinya

  Central Research Laboratory Hitachi Ltd.

関連論文

• 101 レーザによるTi系合金の表面改質(表面改質)
• 328 YAGレーザによるTiAlの表面改質(レーザモニタリング)
• 444 レーザによる TiAl 金属間化合物の表面改質
• 401 TiAl金属間化合物のレーザ表面改質
• Optically Pumped Blue-Green Laser Operation Above Room-Temperature in Zn_Cd_Se-ZnS_Se_ Multiple Quantum Well Structures Grown by Metalorganic Molecular Beam Epitaxy
• 25pYK-3 ジクロロベンゼン分子の電子遷移強度解析
• YAGレーザ第5高調波によるサファイヤの微細加工
• Strain Relaxation and Induced Defects in SiGe Thin Films Grown on Ion-Implanted Si Substrates
• Enhancement of Strain Relaxation of SiGe Thin Layers by Pre-Ion-Implantation into Si Substrates
• 「時間分解レーザー計測の最近の進展」解説小特集号によせて
• テラワット2サイクルパルスの発生と高次高調波変換
• CS-4-1 レーザを用いた微量ガス計測技術(CS-4.波長域が広がるレーザ技術とその応用〜「新波長レーザ」のシーズとニーズの融合に向けて〜,シンポジウムセッション)
• 高機能レーザー光源のガスセンシングへの応用 : 中赤外差周波光源を中心にして
• 「期待される波長可変中赤外レーザーデバイス」解説小特集号によせて
• レーザーブレイクダウンにより生じる水中マイクロバブル生成過程計測
• 分極反転デバイスによる中赤外光源を用いたガスモニタリング
• LAMP2006開催報告
• 「レーザーによる環境微量物質の計測」解説小特集号によせて
• 「燃焼・流体の先端研究におけるレーザーセンシング技術の動向」解説小特集号によせて
• Electronic Structure of Protonic Conductor SrTi_Sc_O_3 Probed by Soft-X-ray Spectroscopy
• Electronic Structure of Ce_Nd_xO_ Probed by Soft-X-Ray Spectroscopy
• Unoccupied Electronic State of SrTi_Nb_xO_3 Observed by Inverse-Photoemission Spectroscopy
• Evidence of O-H Bond in the Bulk State of Protonic Conductor Y-Doped SrCeO_3 by Soft-X-Ray Spectroscopy
• Band Structure of TiO_2-Doped Yttria-Stabilized Zirconia Probed by Soft-X-Ray Spectroscopy
• Ce-O Hybridization Effect of Protonic Conductor SrCe_Y_xO_ Observed by Resonant-Photoemission Spectroscopy
• Performance Comparison of Real-Time Laser Absorption Spectrometers for NH_3 Detection at 1.54 and 3.03μm in a H_2O Vapor Mixture
• Measurements of NO_2 Concentration with Wide Dynamic Range Based on Laser Absorption Spectroscopy Using a Multi-Pass Optical Cell : Effects of Ambient Temperature Change at the Optical Cell
• Parametric Studies on Improved Laser Cutting Performance of Magnesium Alloy with Two Flow Nozzles
• Trace Methane Detection Based on Raman Spectroscopy Using a High Finesse Optical Resonator
• Performance Characteristics of Power Build-Up Cavity for Raman Spectroscopic Measurement
• Yb Fiber Laser Pumped Mid-IR Source Based on Difference Frequency Generation and Its Application to Ammonia Detection
• レｰザｰ誘起蛍光法を用いた有機化学物質の検出
• Theoretical Analysis of a Radio Frequency Excited Slab CO_2 Laser
• レｰザｰ切断時のカｰフ内気流の観察
• 中赤外 Optical Multi-channel Analyzer の開発
• Spatially Resolved Gain Measurements of a Slab Type RF Excited CO_2 Laser
• 安定共振器を伴った不安定共振器
• 高速度撮影によるレーザー切断現象の研究
• レーザ焼入れに関する研究
• CO_2スラブ型レーザーの small signal gain 空間分布
• フォワードモードとバックワードモードが結合した共振器
• An Experimental Investigation of the Novel Unstable Resonator with a Stable Resonator Core
• レーザ切断におけるカーフ内気流の観察
• レーザ厚板切断におけるカーフ内流れの観察
• Microscopic Investigation of Al_Ga_N on Sapphire
• Anisotropic Dielectric Constants of Bi_2Sr_2(CaY_x)Cu_2O_(x=0.0,0.6)Single Crystals in 0.5-5.0 eV Region
• Effects of Ce Doping on Electronic Structures of Ln_Ce_xCuO_4 (Ln=Nd, Sm, Eu, Gd) Studied by Core-Level Photoemission Spectroscopy
• Valence States of Rare-Earth Ions in RERuSn_3 (RE=La, Ce, Pr, Nd, Sm) and Related Compounds Studied by Core-Level Photoemission Spectroscopy
• X-Ray Photoemission Spectroscopy of Nd_Ce_xCuO_4 and La_Sr_xCuO_4
• Optical Absorption of Gas Phase C_ and C_
• Introduction of Uniaxial Strain into Si/Ge Heterostructures by Selective Ion Implantation
• Development of Thin SiGe Relaxed Layers with High-Ge Composition by Ion Implantation Method and Application to Strained Ge Channels
• On Effects of Gate Bias on Hole Effective Mass and Mobility in Strained-Ge Channel Structures
• Thickness Dependence of Strain Field Distribution in SiGe Relaxed Buffer Layers
• Strain-Field Evaluation of Strain-Relaxed Thin SiGe Layers Fabricated by Ion Implantation Method
• Electroluminescence from Strained SiGe/Si Quantum Well Structures Grown by Solid Source Si Molecular Beam Epitaxy
• RF放電励起スラブ炭酸ガスレーザー媒質中の温度計測
• 半導体レーザー外部共振器による微量可燃性ガス検出に関する研究
• レーザー吸収分光用円筒型マルチパスセルの光学特性
• 円筒型マルチパスセルを用いた簡易型NO_2計測装置の研究
• レーザーを利用したダイオキシン検知
• Protonic Conduction in the Single Crystal of Sc-Doped SrZrO_3
• Ti-O Hybridization Effect of Lightly La-doped SrTiO_3 Observed by Resonant-Photoemission Spectroscopy
• Electronic Structure in the Bulk State of Protonic Conductor CaZrO_3 by Resonant Soft-X-Ray Emission Spectroscopy : Electrical Properties of Condensed Matter
• Reflection High Energy Electron Diffraction Intensity Oscillations during the Growth of ZnSe on Cleaved GaAs(110) Surface by Molecular Beam Epitaxy
• Two-Dimensional Simulation of and Experiments on the Forward-Backward Modes Coupled Unstable Resonator
• 中赤外における時間分解Optical Multi-channel Analyzerの開発
• The Effect of Isoelectronic In-Doping on the Structural and Optical Properties of (Al)GaN Grown by Metalorganic Vapor Phase Epitaxy
• Effect on GaN/Al_Ga_N and Al_Ga_N/Al_Ga_N Quantum Wells by Isoelectronic In-Doping during Metalorganic Vapor Phase Epitaxy
• Photoemission Study on Protonic Conductor CaZrO_3:Evidence of the Exchange Mechanism of Proton and Hole
• Transport Coefficients of Indium Antimonide in a Magnetic Field
• The Effect of Isoelectronic In-Doping on the Structural and Optical Properties of (Al)GaN Grown by Metal Organic Vapor Phase Epitaxy
• Mosaic Structure of Ternary Al_In_xN Films on GaN Grown by Metalorganic Vapor Phase Epitaxy
• Structural Properties of Al_In_xN Ternary Alloys on GaN Grown by Metalorganic Vapor Phase Epitaxy
• GaN Based Laser Diode with Focused Ion Beam Etched Mirrors
• Reduction of Etch Pit Density in Organometallic Vapor Phase Epitaxy-Grown GaN on Sapphire by Insertion of a Low-Temperature-Deposited Buffer Layer between High-Temperature-Grown GaN
• Electrical Properties of Bromine-Doped Nickel (Phthalocyanine) Films and Their Structural Change : Chemistry (incl. physical process)
• Metalorganic Vapor Phase Epitaxial Growth of High-Quality AlInN/AlGaN Multiple Layers on GaN : Semiconductors
• Electronic Transport Properties of ZrTiO_4 at High Temperature ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
• Electronic Structure of 4d Transition Metal Compound ZrF_4 by Resonant Photoemission Spectroscopy
• Ti-O Hybridization Effect of Nb-Doped SrTiO_3 by Resonant Photoemission Spectroscopy : Electrical Properties of Condensed Matter
• Optical Investigations of Solid-Phase Crystallization of Si_Ge_x
• Optical Investigations of Solid-Phase Crystallization (SPC) Properties of Si_Ge_X
• Atomic-Layer Doping in Si_Ge_x/Si/Si_Ge_x Heterostructures by Two-Step Solid-Phase Epitaxy
• Atomic-Layer Doping in Si_Ge_x/Si/Si_Ge_x Heterostructures by Two-Step Solid-Phase Epitaxy
• Ultrahigh Electron Mobilities in Si_Ge_x/Si/Si_Ge_x Heterostructures with Abrupt Interfaces Formed by Solid-Phase Epitaxy
• Theoretical Evaluation of Compositional Contrast of Scanning Electron Microscope Images
• Compatibility of Lithium Oxide Single Crystals with Tungsten Sputtered Films : The Effect of Passivation Films
• Compatibility of Lithium Titanite Fused Crystals with Nickel Foils
• An ESR Study of YBa_2Cu_3O_ and Y_2BaCuO_5 with Oxygen Deficiencies : Electrical Properties of Condensed Matter
• Construction of Electric-Field-Modulated Picosecond Time-Resolved Fluorescence Spectrometer
• Analysis of Charging Effect During Observation of Trench Structures by Seanrting Electron Microscope
• Simulation of Scanning Electron Microscope Image for Trench Structures
• 高繰り返しパルスファイバレーザーの開発
• Parametric Studies of a 13.56-MHz RF-Discharge-Pumped CO_2 Laser with Wide-Area Cylindrical Slab Geometry
• ネルンスト素子の候補としてのInSb熱電半導体の輸送係数
• 磁場中における熱電変換材料の輸送特性測定
• ペルチェ電流リード及び電流リード用傾斜機能材の提案
• Design Considerations of a RF-Pumped High-Power CO_2 Laser with a W-Axicon Type Optical Resonator
• 218206 小型ハイブリッドロケットの燃焼不安定に関する研究(一般04 熱力学・熱工学1)

もっと見る 閉じる

スポンサーリンク