Development of Thin SiGe Relaxed Layers with High-Ge Composition by Ion Implantation Method and Application to Strained Ge Channels

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2008-08-25

著者

• USAMI Noritaka

  Institute for Materials Research, Tokoku University

• Usami Noritaka

  Tohoku Univ. Miyagi Jpn

• NAKAGAWA Kiyokazu

  Center for Crystal Science and Technology, University of Yamanashi

• SAWANO Kentarou

  Research Center for Silicon Nano-Science, Advanced Research Laboratories, Tokyo City University

• SHIRAKI Yasuhiro

  Research Center for Advanced Science and Technology (RCAST), The University of Tokyo

• Usami Noritaka

  Institute For Material Research Tohoku University

• Sawano Kentarou

  Research Center For Silicon Nano-science Advanced Research Laboratories Musashi Institute Of Technol

• HOSHI Yusuke

  Research Center for Silicon Nano-Science, Advanced Research Laboratories, Musashi Institute of Techn

• HIRAOKA Yoshiyasu

  Research Center for Silicon Nano-Science, Advanced Research Laboratories, Musashi Institute of Techn

• SATOH Yuu

  Research Center for Silicon Nano-Science, Advanced Research Laboratories, Musashi Institute of Techn

• OGAWA Yuta

  Research Center for Silicon Nano-Science, Advanced Research Laboratories, Musashi Institute of Techn

• YAMADA Atsunori

  Research Center for Silicon Nano-Science, Advanced Research Laboratories, Musashi Institute of Techn

• Ozawa Yusuke

  Research Center For Silicon Nano-science Advanced Research Laboratories Musashi Institute Of Technol

• Hoshi Yusuke

  Research Center For Silicon Nano-science Advanced Research Laboratories Musashi Institute Of Technol

• Yamada Atsunori

  Research Center For Silicon Nano-science Advanced Research Laboratories Musashi Institute Of Technol

• Nakagawa Kenichi

  Liquid Ctystal Laboratories Sharp Corporation

• Hirose Yoshihisa

  Research Center For Silicon Nano-science Advanced Research Laboratories Musashi Institute Of Technol

• Satoh Yuu

  Research Center For Silicon Nano-science Advanced Research Laboratories Musashi Institute Of Technol

• Shiraki Y

  Research Center For Silicon Nano-science Advanced Research Laboratories Musashi Institute Of Technol

• Nakagawa K

  Center For Crystal Science And Technology University Of Yamanashi

• Shiraki Yasuhiro

  Research Center For Advanced Science And Technology (rcast) The University Of Tokyo

• Nakagawa Kiyokazu

  Center for Crystal Science and Technology, Faculty of Engineering, University of Yamanashi, Kofu 400-8511, Japan

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