Analysis of dislocations in strained-Si/SiGe devices by EBIC technique

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概要

• 論文の詳細を見る
• 2004-09-15

著者

• Kimura Yoshinobu

  Central Research Laboratory Hitachi Ltd.

• Anan Yoshihiro

  Central Research Laboratory Hitachi Ltd.

• Sugii Nobuyuki

  Central Research Laboratory Hitachi Ltd.

• NOZOE Mari

  Hitachi High-Technologies Corporation

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