Novel SiGe-on-Insulator Virtual Substrate Fabricated by Self-Melt-Solidification

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概要

• 論文の詳細を見る
• 2001-09-25

著者

• SUGII Nobuyuki

  Central Research Laboratory, Hitachi, Ltd.

• YAMAGUCHI Shinya

  Central Research Laboratory, Hitachi Ltd.

• WASHIO Katsuyoshi

  Central Research Laboratory, Hitachi, Ltd.

• Washio Katsuyoshi

  Central Research Laboratory Hitachi Ltd.

• Sugii Nobuyuki

  Central Research Laboratory Hitachi Ltd.

• Yamaguchi Shinya

  Central Research Laboratory Hitachi Ltd.

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