Nucleation Control in Solid-Phase Crystallization of a-Si/SiO_2 by Local Ge Insertion
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-30
著者
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SADOH Taizoh
Department of Electronics, Kyushu University
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MIYAO Masanobu
Department of Electronics, Kyushu University
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Tsunoda Isao
Department Of Electronics Kyushu University
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KENJO Atsushi
Department of Electrical Engineering,Faculty of Engineering,Kyushu University
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NAGATOMO Kei
Department of Electronics, Kyushu University
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YAMAGUCHI Shinya
Central Research Laboratory, Hitachi Ltd.
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Nagatomo Kei
Department Of Electronics Kyushu University
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Miyao M
Department Of Electronics Kyushu University
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