Evaluation of Damage Induced by Low-Energy Ion Irradiation in Silicon

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概要

• 論文の詳細を見る
• 九州大学の論文

著者

• SADOH Taizoh

  Department of Electronics, Kyushu University

• BABA Akira

  Center for Transdisciplinary Research, Niigata University

• Baba A

  Niigata Univ. Niigata Jpn

• Sadoh Taizoh

  Department Of Electronics Faculty Of Engineering Kyushu University

• Baba A

  Hachinohe Inst. Technol. Aomori

• BABA Akiyoshi

  Department of Electrical Engineering,Faculty of Engineering,Kyushu University

• KENJO Atsushi

  Department of Electrical Engineering,Faculty of Engineering,Kyushu University

• Baba A

  Center For Transdisciplinary Research Niigata University

• Baba A

  Kyushu Univ.

• Kenjo A

  Kyushu Univ.

• KENJO Atsushi

  Kyushu University, Department of Electronics

• Kenjo A

  Kyushu University Department Of Electronics

• KENJO Atsushi[et

  Department of Electrical Engineering,Faculty of Engineering,Kyushu University

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• Effects of Si Layer Thickness on Solid-Phase Crystallization of Stacked Ge/Si/SiO2 Structures

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