Reduction of Base Resistance and Increase in Cutoff Frequency of Si Bipolar Transistor Using Rapid Vapor-Phase Doping

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-04-30

著者

• Kikuchi Tsuneo

  Nmij Aist

• WASHIO Katsuyoshi

  Central Research Laboratory, Hitachi, Ltd.

• Kiyota Yukihiro

  Central Research Laboratory, Hitachi Ltd.

• Kiyota Y

  Central Research Laboratory Hitachi Ltd.

• Kiyota Yukihiro

  Central Research Laboratory Hitachi

• Washio K

  Central Research Laboratory Hitachi Ltd.

• Washio Katsuyoshi

  Central Research Laboratory Hitachi Ltd.

• Kikuchi T

  Graduate School Of Engineering Science Osaka University:core Research For Evolutional Science &

• INADA Taroh

  College of Engineering, Hosei University

• KIKUCHI Toshiyuki

  Device Development Center, Hitachi Ltd.

• Inada Taroh

  College Of Engineering Hosei University

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• Test Structure and Experimental Analysis of Emitter-Base Reverse Voltage Stress Degradation in Self-Aligned Bipolar Transistors (Special Issue on Microelectronic Test Structure)
• Process and Device Technologies for High Speed Self-Aligned Bipolar Transistors
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• High-Frequency, Low-Noise Si Bipolar Transistor Fabricated Using Self-Aligned Metal/IDP Technology (Special Issue on High-Frequency/speed Devices in the 21st Century)
• The Role of Hydrogen during Rapid Vapor-Phase Doping Analyzed by FTIR-ATR
• Shallow p-Type Layers in Si by Rapid Vapor-Phase Doping for High-Speed Bipolar and MOS Applications (Special Issue on Ultra-High-Speed LSIs)
• Electron Field Emission from Sulfur Ion Implanted Homoepitaxial Diamond Films(Surfaces, Interfaces, and Films)
• Reduction of Base Resistance and Increase in Cutoff Frequency of Si Bipolar Transistor Using Rapid Vapor-Phase Doping
• Reduction of Base Resistance and Enhancement of Cutoff Frequency of High-Speed Si Bipolar Transistor Using Rapid Vapor-Phase Doping
• HCI-Free Selective Epitaxial SiGe Growth by LPCVD for 80-GHz BiCMOS Production
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• Sticking Configuration of Boron Atoms from B2H6 on Silicon during Rapid Vapor-Phase Doping
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