Spectroscopic Study on Plasma-Enhanced Chemical Vapor Deposition of YBa_2Cu_3O_x Superconducting Thin Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-01-15

著者

• SAITO Shinji

  Toshiba Corporation, Advanced Semiconductor Devices Research Laboratories

• Saito S

  Chiba Univ. Chiba Jpn

• Imagawa Kazushige

  Central Research Laboratory, Hitachi, Ltd.

• Kanehori Keiichi

  Central Research Laboratory, Hitachi, Ltd.

• SAITO Sakae

  Central Research Laboratory, Hitachi, Ltd.

• Saito S

  Kogakuin Univ. Tokyo Jpn

• SUGII Nobuyuki

  Central Research Laboratory, Hitachi, Ltd.

• Kanehori Keiichi

  Central Research Laboratory Hitachi Ltd

• Saito Sakae

  Central Research Laboratory Hitachi Ltd.

• Sugii N

  Central Research Laboratory Hitachi Ltd.

• Sugii Nobuyuki

  Central Research Laboratory Hitachi Ltd.

• Kanehori K

  Hitachi Ltd. Tokyo Jpn

• Imagawa K

  Central Research Laboratory Hitachi Ltd.

• Imagawa Kazushige

  Central Research Laboratory Hitachi Ltd.

• Saito Shinji

  Nhk Spring Co. Ltd.

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