Conformal Platinum Electrodes Prepared by Chemical Vapor Deposition Using a Liquid MeCpPtMe_3 Precursor in an Oxidizing Atmosphere

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概要

• 論文の詳細を見る
• 2000-08-28

著者

• Hiratani M

  Central Research Laboratory Hitachi Ltd.

• Hiratani M

  Central Research Laboratory Hitachi Ltd

• Hiratani Masahiko

  Central Research Laboratory Hitachi Ltd.

• Nabatame Toshihide

  Mirai-association Of Super-advanced Electronics Technologies (mirai-aset) National Institute Of Adva

• Nabatame T

  Aist Tsukuba Jpn

• Nabatame Toshihide

  Mirai-aset Advanced Industrial Science And Technology (aist)

• Nabatame Toshihide

  Hitachi Research Laboratory Hitachi Ltd.

• Kimura Shingo

  Department Of Physics School Of General Education Iwate Medical University

• Imagawa Kazushige

  Central Research Laboratory, Hitachi, Ltd.

• Matsui Yasushi

  Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat

• Matsui Y

  Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn

• Matsui Y

  Nims Tsukuba Jpn

• Kimura S

  Ntt Photonics Lab. Kanagawa Jpn

• MATSUI Yuichi

  Central Research Laboratory, Hitachi, Ltd.

• SHIMAMOTO Yasuhiro

  Central Research Laboratory, Hitachi, Ltd.

• KIMURA Shinichiro

  Central Research Laboratory, Hitachi, Ltd

• Kimura S

  Central Research Laboratory Hitachi Ltd.

• Matsui Y

  Central Research Laboratory Hitachi Ltd.

• Muto Y

  The Institute For Materials Research Tohoku University

• Shimamoto Yasuhiro

  Central Research Laboratory Hitachi Ltd.

• Kimura Shinichiro

  Central Research Laboratory Hitachi Ltd.

• Shimamoto Y

  Hitachi Ltd. Tokyo Jpn

• Imagawa K

  Central Research Laboratory Hitachi Ltd.

• Imagawa Kazushige

  Central Research Laboratory Hitachi Ltd.

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