Si Oxynitridation with Helicon-Wave Excited Nitrogen Plasma:Effects of Plasma Divergence and Concentration on Substrates

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-03-15

著者

• Ikoma H

  Sci. Univ. Tokyo Chiba Jpn

• Ikoma Hideaki

  Faculty Of Science And Technology Science University Of Tokyo

• Kimura Shingo

  Department Of Physics School Of General Education Iwate Medical University

• Kimura S

  Ntt Photonics Lab. Kanagawa Jpn

• Kimura S

  Central Research Laboratory Hitachi Ltd.

• KIMURA Shinjiro

  Faculty of Science and Technology, Science University of Tokyo

• ITO Tetsuya

  Faculty of Science and Technology, Science University of Tokyo

• TABAKOMORI Masato

  Faculty of Science and Technology, Science University of Tokyo

• OKAMOTO Yoshinaga

  Faculty of Science and Technology, Science University of Tokyo

• Tabakomori Masato

  Faculty Of Science And Technology Science University Of Tokyo

• Ito Tetsuya

  Faculty Of Science And Technology Science University Of Tokyo

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