ITO Tetsuya | Faculty of Science and Technology, Science University of Tokyo

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概要

• 同名の論文著者
• Faculty of Science and Technology, Science University of Tokyoの論文著者

関連著者

• Ikoma Hideaki

  Faculty Of Science And Technology Science University Of Tokyo

• ITO Tetsuya

  Faculty of Science and Technology, Science University of Tokyo

• Ito Tetsuya

  Faculty Of Science And Technology Science University Of Tokyo

• Ikoma H

  Sci. Univ. Tokyo Chiba Jpn

• Kimura Shingo

  Department Of Physics School Of General Education Iwate Medical University

• Kimura S

  Ntt Photonics Lab. Kanagawa Jpn

• Kimura S

  Central Research Laboratory Hitachi Ltd.

• KIMURA Shinjiro

  Faculty of Science and Technology, Science University of Tokyo

• TABAKOMORI Masato

  Faculty of Science and Technology, Science University of Tokyo

• OKAMOTO Yoshinaga

  Faculty of Science and Technology, Science University of Tokyo

• Tabakomori Masato

  Faculty Of Science And Technology Science University Of Tokyo

• KITAYAMA Daisuke

  Faculty of Science and Technology, Science University of Tokyo

• Kitayama Daisuke

  Faculty Of Science And Technology Science University Of Tokyo

• IKOMA Hideaki

  Faculty of Science and Technology, Science University of Tokyo

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著作論文

• Si Oxynitridation with Helicon-Wave Excited Nitrogen Plasma:Effects of Plasma Divergence and Concentration on Substrates
• Silicon Oxynitridation with Inductively Coupled Oxygen-Nitrogen Mixed Plasma

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