Inversion Electron Mobility Affected by Phase Separation in High-Permittivity Gate Dielectrics
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2003-12-01
著者
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Hiratani Masahiko
Central Research Laboratory Hitachi Ltd.
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SAITO Shin-ichi
Central Research Laboratory, Hitachi, Ltd.
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MATSUI Yuichi
Central Research Laboratory, Hitachi, Ltd.
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TORII Kazuyoshi
Central Research Laboratory, Hitachi, Ltd.
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SHIMAMOTO Yasuhiro
Central Research Laboratory, Hitachi, Ltd.
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Saito S
Central Research Laboratory Hitachi Ltd.
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Kimura S
Central Research Laboratory Hitachi Ltd.
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Matsui Y
Central Research Laboratory Hitachi Ltd.
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Torii K
Central Research Laboratory Hitachi Ltd.
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Shimamoto Yasuhiro
Central Research Laboratory Hitachi Ltd.
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