Single-Target Sputtering Process for Lead Zirconate Titanate Thin Films with Precise Composition Control

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-12-30

著者

• Takeda E

  Department Of Clinical Nutrition University Of Tokushima Graduate School

• Takeda E

  Hitachi Ltd. Tokyo Jpn

• Takeda E

  Univ. Of Tokushima Graduate School Tokushima Jpn

• Takeda Eiji

  Central Research Laboratory Hitachi Ltd.

• Takeda Eiji

  Central Research Laboratory Hitachi Lid.

• Takeuchi H

  Osaka Univ. Suita Jpn

• TORII Kazuyoshi

  Central Research Laboratory, Hitachi, Ltd.

• TAKEUCHI Hiroshi

  Central Research Laboratory, Hitachi Ltd.

• Torii K

  Central Research Laboratory Hitachi Ltd.

• Torii Kazuyoshi

  Central Research Laboratory Hitachi Lid.

• Torii K

  Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn

• KAGA Toru

  Central Research Laboratory, Hitachi, Lid.

• KUSHIDA Keiko

  Central Research Lab., Hitachi, Lid.

• Kushida K

  Hitachi Ltd. Tokyo Jpn

• Takeda Eiji

  Central Research Laboratory

• Takeuchi Hiroshi

  Central Research Laboratory Hitachi Ltd.

• Takeda Eiji

  徳島大学 病態栄養

• Takeuchi Hiroshi

  Central Research Lab. Hitachi Lid.

• KAGA Toru

  Central Research Laboratory, Hitachi Ltd

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