Self-Aligned Fabrication Process of Electrode for Organic Thin-Film Transistors on Flexible Substrate Using Photosensitive Self-Assembled Monolayers
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概要
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A new long-wavelength-photosensitive self-assembled-monolayer (SAM) was developed, and a process fabricating alignment-free printable electrodes for flexible organic thin-film transistors (OTFTs) with the SAM was proposed. The SAM was degraded and its wetability was changed from hydrophobic to hydrophilic by irradiating it with UV light (${>}350$ nm). The irradiated areas of SAM became more hydrophilic with tetramethylammonium hydroxide (TMAH) solution, which is a commercially available photoresist developer. Using the SAM and a back substrate exposure technique with TMAH rinsing, we can induce the self-alignment of solution-processed source/drain electrodes with respect to a gate electrode. A 20-μm-gap pattern of PEDOT was successfully formed by spin-coating on a plastic substrate.
- 2007-04-30
著者
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Torii Kazuyoshi
Central Research Laboratory Hitachi Lid.
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Yamaguchi Kazuo
Department Of Biological Sciences Graduate School Of Natural Science And Technology Kanazawa Univers
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Arai Tadashi
Department Of Antibiotics Research Institute For Chemobiodynamics Chiba University
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Ando Masahiko
Advanced Research Laboratory, Hitachi, Ltd., Hiki, Saitama 350-0395, Japan
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Fujimori Masaaki
Advanced Research Lab., Hitachi, Ltd., Hatoyama, Saitama 350-0395, Japan
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Sato Naoya
Department of Chemistry, Faculty of Science, Kanagawa University, Hiratsuka, Kanagawa 259-1293, Japan
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Kawasaki Masahiro
Advanced Research Laboratory, Hitachi, Ltd., Hiki, Saitama 350-0395, Japan
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Shiba Takeo
Advanced Research Laboratory, Hitachi, Ltd., Hiki, Saitama 350-0395, Japan
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Yamaguchi Kazuo
Department of Chemistry, Faculty of Science, Kanagawa University, Hiratsuka, Kanagawa 259-1293, Japan
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