Preparation of Lead Zirconate Titanate Thin Films by Reactive Evaporation (<Special Issue> FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
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概要
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Lead zirconate titanate thin films have been successfully fabricated by reactive evaporation. Elemental Pb, Zr, and Ti were evaporated in ozone-oxygen mixture ambient. Excellent controls of uniformity of thickness and composition were achieved over a large area (within ±2% on 4-inch wafer). The electrical properties were examined as a function of Pb content in the films. High dielectric constant (ε〜1000) and low leakage current(1.7×10^<-7> A/cm^2) were realized for the film with stoichiometric composition.
- 社団法人応用物理学会の論文
- 1994-09-30
著者
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Torii Kazuyoshi
Central Research Laboratory Hitachi Lid.
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Ohji Yuzuru
Central Research Laboratory Hitachi
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Saitoh Sakae
Central Research Laboratory Hitachi Ltd.
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