I-3 Deposition of thin film based on SAW streaming(Device application (English session))
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概要
- 論文の詳細を見る
- 超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
- 2006-11-15
著者
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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Matsui Y
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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MATSUI Yoshio
Environmental Pollution Research Institute of Nagoya City
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Murochi Nobuaki
Shizuoka Univ.
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Sugimoto Mitsunori
Shizuoka Univ.
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Matsui Yoshikazu
Shizuoka Univ.
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Kondoh Jun
Shizuoka Univ.
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Matsui Y
Central Research Laboratory Hitachi Ltd.
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MATUSI Yasuji
Product Development Laboratory, Mitsubishi Electric Corporation
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