Sub-100-nm Device Fabrication using Proximity X-Ray Lithography at Five Levels

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-12-30

著者

• MORITA Hirofumi

  NTT LSI Laboratories

• Hokama A

  Control And Prevention Of Infectious Diseases Department Of Medicine And Therapeutics Faculty Of Med

• Hokama Akira

  琉球大学 医学部感染病態制御学

• ODA Masatoshi

  NTT LSI Laboratories

• MOROSAWA Tetsuo

  NTT LSI Laboratories

• TAGUCHI Takao

  SORTEC Corporation

• AOYAMA Hajime

  ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories

• MATSUI Yasuji

  ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories

• MATSUDA Tadahito

  NTT Telecommunications Energy Laboratories

• ODA Masatoshi

  NTT Telecommunications Energy Laboratories

• ODA Masatoshi

  NTT System Electronics Laboratories

• MATSUDA Tadahito

  NTT System Electronics Laboratories

• Morita H

  Lcd Division Toshiba Corporation

• Aoyama H

  Aset Super-fine Sr Lithography Laboratory

• Aoyama Hajime

  Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At

• Aoyama Hajime

  Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt

• Iizuka Takashi

  Fujitsu Laboratories Ltd.:aset Super-fine Sr Lithography Laboratory

• Taguchi T

  Research Laboratories Nippondenso Co. Ltd.

• Hokama Akira

  The First Department Of Internal Medicine Faculty Of Medicine University Of The Ryukyus

• Matsui Yasushi

  Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat

• Matsui Y

  Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn

• Matsui Y

  Nims Tsukuba Jpn

• HORIUCHI Kei

  Fujitsu Laboratories Ltd.

• IBA Yoshihisa

  Fujitsu Laboratories Ltd.

• TAGUCHI Takao

  ASET Super-fine SR Lithography Laboratory

• KUMASAKA Fumiaki

  Fujitsu Laboratories Ltd.

• SAMBONSUGI Yasuhiro

  Fujitsu Laboratories Ltd.

• DEGUCHI Kimiyoshi

  NTT Telecommunications Energy Laboratories

• FUKUDA Makoto

  NTT Telecommunications Energy Laboratories

• MORITA Hirofumi

  NTT Telecommunications Energy Laboratories

• MATSUI Yoshio

  Environmental Pollution Research Institute of Nagoya City

• Fukuda M

  Chitose Inst. Sci. And Technol. Hokkaido Jpn

• Matsui Y

  Central Research Laboratory Hitachi Ltd.

• Muto Y

  The Institute For Materials Research Tohoku University

• Horiuchi K

  Fujitsu Laboratories Ltd.

• Horiuchi Kei

  Fujitsu Laboratories

• Iba Yoshihisa

  Fujitsu Laboratories Ltd.:aset Super-fine Sr Lithography Laboratory

• Taguchi T

  Department Of Electrical And Electronic Engineering Yamaguchi University

• Iizuka T

  Fujitsu Laboratories Ltd.:aset Super-fine Sr Lithography Laboratory

• Deguchi K

  Department Of Electronics And Information Systems Osaka University

• AOYAMA Hidetake

  Department of Electrical Engineering, Faculty of Engineering, Gunma University

• Matsui Yasuji

  Aset Super-fine Sr Lithography Laboratory

• MATUSI Yasuji

  Product Development Laboratory, Mitsubishi Electric Corporation

• Kumasaka Fumiaki

  Fujitsu Laboratories Ltd.:aset Super-fine Sr Lithography Laboratory

• Iizuka Takashi

  Fujitsu Laboratories Ltd.

• Aoyama Hajime

  ASET Super-fine SR Lithography Laboratory, Atsugi, Kanagawa 243-0198, Japan

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