Sub-0.1 μm Resist Patterning in Soft X-Ray (13 nm) Projection Lithography

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-12-30

著者

• YAMASHITA Yoshio

  SORTEC Corporation

• TAGUCHI Takao

  SORTEC Corporation

• Oizumi H

  Hitachi Ltd. Tokyo Jpn

• Oizumi H

  Aset Euvl Lab. Kanagawa Jpn

• Oizumi Hiroaki

  Sortec Corporation

• Watanabe Teruo

  Futaba Corporation

• Atoda Nobufumi

  Laboratory For Advanced Optical Technology National Institute Of Advanced Industrial Science And Tec

• Atoda N

  Sortec Ibaraki Jpn

• Atoda Nobufumi

  Sortec

• Murakami K

  静岡大学電子工学研究所

• Watanabe T

  Components Development Group Sony Corporation

• Watanabe T

  Ritsumeikan Univ. Shiga Jpn

• Watanabe Tetsu

  Components Development Group Sony Corporation

• Watanabe T

  Tokyo Inst. Technol. Kanagawa Jpn

• Watanabe T

  Reserch And Development Division Toto Ltd.

• Nagata H

  Sumitomo Osaka Cement Co. Ltd. Chiba Jpn

• MAEJIMA Yukihiko

  SORTEC Corporation

• WATANABE Takeo

  SORTEC Corporation

• MURAKAMI Katsuhiko

  Nikon Corporation

• OHTANI Masayuki

  Nikon Corporation

• NAGATA Hiroshi

  Nikon Corporation

• Yamashita Y

  Power Supply Materials And Devices Laboratory Corporate R&d Center Toshiba Corporation

• Yamashita Yohachi

  Toshiba Materials & Devices Research Laboratories

• Watanabe T

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• Watanabe T

  Tohoku Univ. Sendai Jpn

• Watanabe Toshihide

  Atr Adaptive Communications Research Laboratories:(present Address)science And Technical Research La

• TAGUCHI Takao

  ASET Super-fine SR Lithography Laboratory

• Murakami Kouichi

  Institute Of Material Science University Of Tsukuba

• Nagata H

  Sci. Univ. Tokyo Chiba‐ken Jpn

• Taguchi T

  Department Of Electrical And Electronic Engineering Yamaguchi University

• Yamashita Y

  Central Research Laboratory Hamamatsu Photonics K.k.

• Ohtani M

  Obihiro Univ. Agriculture And Veterinary Medicine Obihiro Jpn

• Maejima Y

  Silicon Systems Research Laboratories Nec Corporation

• Murakami K

  Research Institute Of Electronics Shizuoka University

• MURAKAMI Katsuhiko

  Nikon Corp.

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