X-Ray Mask Distortion Induced in Back-Etching Preceding Subtractive Fabrication: Resist and Absorber Stress Effect

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-05-15

著者

• YAMASHITA Yoshio

  SORTEC Corporation

• Noda S

  Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn

• Noda Shoji

  Toyota Central Research And Development Labs

• Tsuboi S

  Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn

• Suzuki K

  Ntt Transmission Systems Lab. Ibaraki Jpn

• Suzuki Kenji

  Institute For Materials Research Laboratory Tohoku University

• MATSUO Tadashi

  Toppan Printing Co., Ltd.

• Matsuo Tadashi

  Toppan Printing Co. Lid.

• Yoshida Yoichi

  The Institute Of Scientific And Industrial Research Osaka University

• Yamada Yasusada

  Advanced Research Institute Waseda University:advanced Science Research Center Japan Atomic Energy R

• Ohta Takayuki

  Department Of Electronic Engineering Faculty Of Engineering Osaka University

• Yamashita Y

  Power Supply Materials And Devices Laboratory Corporate R&d Center Toshiba Corporation

• Yamashita Yohachi

  Corporate R&d Center Toshiba Corporation

• Yamashita Yohachi

  Toshiba Materials & Devices Research Laboratories

• Noda S

  Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn

• Taguchi Takao

  Hoya Corporation:(present Address) Fujitsu Laboratories Ltd.

• Yamaguchi Yoh-ichi

  Hoya Corporation

• TSUBOI Shinji

  SORTEC Corporation

• OHTA Tsuneaki

  Oki Electric Industry Co., Ltd.

• SHOKI Tsutomu

  HOYA Corporation

• YOSHIHARA Takuya

  NEC Corporation

• MITSUI Soichiro

  NEC Corporation

• NODA Shuichi

  Toppan Printing Co., Lid.

• SUZUKI Kazuo

  SORTEC Corporation

• HOGA Hiroshi

  Toppan Printing Co., Lid.

• SUZUKI Katsumi

  NEC Corporation

• Hoga Hiroshi

  Toppan Printing Co. Lid.

• Hoga Hiroshi

  Oki Electric Industry Co. Ltd.

• Ohta Tsuneaki

  Optoelectronics Joint Research Laboratory

• Ohta Tuneaki

  Oki Electric Industry Co. Ltd.

• Ohta Tsuneaki

  Oki Ekectric Industry Co. Ltd.

• Ohta Tsuneaki

  Oki Electric Industry Co. Ltd.

• Noda Shuichi

  Association Of Super-advanced Electronics Technologies (aset):(present Address)vlsi R&d Center O

• Noda Syuichi

  Oki Electric Industry Co. Ltd.

• Yamashita Yoshio

  Sortec Corporation:(present Address) Oki Electric Industry Co. Ltd.

• Yamashita Yasuharu

  Synthetic Crystal Research Laboratory School Of Engineering Nagoya University

• Ohta T

  Matsushita Electric Industrial Co. Ltd. Osaka Jpn

• Shoki T

  Hoya Corp. Tokyo Jpn

• Shoki Tsutomu

  Hoya Corporation Ngl Development Center

• Mitsui S

  Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt

• Suzuki K

  横浜国大 大学院工学研究院

• Yamashita Y

  Central Research Laboratory Hamamatsu Photonics K.k.

• 鈴木 和夫

  横浜大

• Ohta Takeo

  Tokyo-tokushukinzoku And Co

• Suzuki Katsurmi

  Tamachi Laboratory Superconductivity Research Laboratory Istec

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