Thermally Induced Structural Modification of Nanometer-Order Mo/Si Multilayers by the Spectral Reflectance of Laser-Plasma Soft X-Rays
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-05-15
著者
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渡部 行男
九大院理
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渡辺 征夫
九州大学
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Watanabe Yoshihide
Toyota Central Research And Development Laboratories Inc.
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AZUMA Hirozumi
TOYOTA Central Research and Development Laboratories Inc.
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TAKEICHI Akihiro
TOYOTA Central Research and Development Laboratories Inc.
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KONOMI Ichiro
TOYOTA Central Research and Development Laboratories Inc.
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NODA Shoji
TOYOTA Central Research and Development Laboratories Inc.
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Noda S
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Noda Shoji
Toyota Central R & D Labs. Inc.
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Noda Shoji
Toyota Central Research And Development Labs
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Azuma Hirozumi
Toyota Central Research & Development Laboratories Inc.
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Konomi I
Toyota Central Research & Development Laboratories Inc.
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Konomi Ichiro
Toyota Central R&d Labs. Inc.
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Noda S
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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Noda Shuichi
Association Of Super-advanced Electronics Technologies (aset):(present Address)vlsi R&d Center O
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Noda Syuichi
Oki Electric Industry Co. Ltd.
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Watanabe Yoshihide
Toyota Central R&d Labs. Inc.
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TAKEICHI Akihiro
Toyota Central Research & Development Labs., Inc.
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