Effects of Gas Temperature Gradient, Pulse Discharge Modulation, and Hydrogen Dilution on Particle Growth in Silane RF Discharges
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概要
- 論文の詳細を見る
The effects of gas temperature gradient, pulse discharge modulation, and hydrogen dilution on the growth of particles below about 10 nm in size in silane parallel-plate RF discharges are studied using a high-sensitivity photon-counting laser-light-scattering (PCLLS) method. Thermophoretic force due to the gas temperature gradient between the electrodes drives neutral particles above a few nm in size toward the cool RF electrode which is at room temperature. Pulse discharge modulation is much more effective in reducing the particle density when it is combined with the gas temperature gradient, and particles above a few nm is size cannot be detected by the PCLLS method even after 2 h. Hydrogen dilution of a high H_2/SiH_4 concentration ratio above about 5 is also useful in suppressing particle growth in the radical production region around the plasma/sheath boundary near the RF electrode.
- 社団法人応用物理学会の論文
- 2000-01-15
著者
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渡部 行男
九大院理
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Watanabe Yoshihide
Department Of Electronics Faculty Of Engineering Tottori University
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WATANABE Yukio
Department of Human Genetics, Nagasaki University Graduate School of Biomedical Sciences
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Koga Kenji
National Institute For Advanced Interdisciplinary Research
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渡部 行男
九州工業大学工学部電気工学科
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SHIRATANI Masaharu
Department of Electrical Engineering, Faculty of Engineering, Kyushu University
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Shiratani M
Department Of Electronics Graduate School Of Information Science And Electrical Engineering Kyushu U
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Shiratani Masaharu
Department Of Electoronics Kyushu University
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KOGA Kazunori
Department of Advanced Energy Engineering Sciences, Interdisciplinary Graduate School of Engineering
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Koga K
Department Of Electronics Graduate School Of Information Science And Electrical Engineering Kyushu U
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Koga Kazunori
Department Of Advanced Energy Engineering Sciences Interdisciplinary Graduate School Of Engineering
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Maeda S
Department Of Electronic Device Engineering Graduate School Of Information Science And Electrical En
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Maeda Shinichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Muroron Institute Of Tech
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Watanabe Yukio
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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Koga Kazunori
Department of Electoronics, Kyushu University
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Shiratani Masaharu
Department of Electoronics, Kyushu University
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