Shoki T | Hoya Corp. Tokyo Jpn
スポンサーリンク
概要
関連著者
-
Shoki T
Hoya Corp. Tokyo Jpn
-
Shoki Tsutomu
Hoya Corporation Ngl Development Center
-
YAMASHITA Yoshio
SORTEC Corporation
-
Tsuboi S
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
-
Yamashita Yohachi
Corporate R&d Center Toshiba Corporation
-
Yamashita Yohachi
Toshiba Materials & Devices Research Laboratories
-
Yamaguchi Yoh-ichi
Hoya Corporation
-
TSUBOI Shinji
SORTEC Corporation
-
Yamashita Yoshio
Sortec Corporation:(present Address) Oki Electric Industry Co. Ltd.
-
Yamashita Y
Central Research Laboratory Hamamatsu Photonics K.k.
-
Yoshida Yoichi
The Institute Of Scientific And Industrial Research Osaka University
-
Yamada Yasusada
Advanced Research Institute Waseda University:advanced Science Research Center Japan Atomic Energy R
-
Yamashita Y
Power Supply Materials And Devices Laboratory Corporate R&d Center Toshiba Corporation
-
Yamashita Yasuharu
Synthetic Crystal Research Laboratory School Of Engineering Nagoya University
-
Komano H
Tokyo Ohka Kogyo Co. Ltd. Kanagawa Jpn
-
Noda S
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
-
Noda Shoji
Toyota Central Research And Development Labs
-
Suzuki K
Ntt Transmission Systems Lab. Ibaraki Jpn
-
Suzuki Kenji
Institute For Materials Research Laboratory Tohoku University
-
Ohta Takayuki
Department Of Electronic Engineering Faculty Of Engineering Osaka University
-
Noda S
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
-
KINOSHITA Hiroo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
-
WATANABE Takeo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
-
OHTA Tsuneaki
Oki Electric Industry Co., Ltd.
-
SHOKI Tsutomu
HOYA Corporation
-
HOGA Hiroshi
Toppan Printing Co., Lid.
-
Hoga Hiroshi
Oki Electric Industry Co. Ltd.
-
Ohta Tsuneaki
Optoelectronics Joint Research Laboratory
-
Ohta Tuneaki
Oki Electric Industry Co. Ltd.
-
Ohta Tsuneaki
Oki Ekectric Industry Co. Ltd.
-
Ohta Tsuneaki
Oki Electric Industry Co. Ltd.
-
Noda Shuichi
Association Of Super-advanced Electronics Technologies (aset):(present Address)vlsi R&d Center O
-
Noda Syuichi
Oki Electric Industry Co. Ltd.
-
Ohta T
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
-
Watanabe T
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
-
Mitsui S
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt
-
Kinoshita H
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
-
Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
-
Suzuki K
横浜国大 大学院工学研究院
-
鈴木 和夫
横浜大
-
Ohta Takeo
Tokyo-tokushukinzoku And Co
-
Suzuki Katsurmi
Tamachi Laboratory Superconductivity Research Laboratory Istec
-
Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
-
Lee Seung
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
-
Ahn Jinho
Microelectronics Research Laboratories Nec Corporation
-
MATSUO Tadashi
Toppan Printing Co., Ltd.
-
Matsuo Tadashi
Toppan Printing Co. Lid.
-
HADA Hideo
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd.
-
Taguchi Takao
Hoya Corporation:(present Address) Fujitsu Laboratories Ltd.
-
Kasai Masanori
Oki Electric Industry Co. Ltd.
-
YOSHIHARA Takuya
NEC Corporation
-
MITSUI Soichiro
NEC Corporation
-
NODA Shuichi
Toppan Printing Co., Lid.
-
SUZUKI Kazuo
SORTEC Corporation
-
SUZUKI Katsumi
NEC Corporation
-
MITSUI Soichiro
SORTEC Corporation
-
ASHIKAGA Kinya
SORTEC Corporation
-
NODA Syuichi
Oki Electric Industry Co., Ltd.
-
HOGA Hiroshi
Oki Electric Industry Co., Ltd.
-
SUZUKI Katsumi
Microelectronics Research Laboratories, NEC Corporation
-
Hoga Hiroshi
Toppan Printing Co. Lid.
-
Sakaya Noriyuki
Hoya Corporation Ngl Development Center
-
HADA Hideo
Advanced Material Development Division 1, Tokyo Ohka Kogyo Co., Ltd.
-
KOMANO Hiroshi
Advanced Material Development Division 1, Tokyo Ohka Kogyo Co., Ltd.
-
Watanabe Takeo
Univ. Hyogo Hyogo Jpn
-
Okazaki Shinji
Association Of Super-advanced Electonics Technologies
-
HAMAMOTO Kazuhiro
Department of Materials Science and Engineering, Faculty of Engineering
-
HOSOYA Morio
Electronics development Center; HOYA Corporation
-
SHOKI Tsutomu
Electronics development Center; HOYA Corporation
-
Sakaya Noriyuki
Hoya Corporation Electro-optics Company R&d Center
-
Watanabe Takayuki
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
著作論文
- X-Ray Mask Distortion Induced in Back-Etching Preceding Subtractive Fabrication: Resist and Absorber Stress Effect
- Highly Sensitive and Stress-Free Chemically Amplified Negative Working Resist, TDUR-N9, for 0.1 μm Synchrotron Radiation (SR) Lithography
- Reduction of X-Ray Irradiation-Induced Pattern Displacement of SiN Membranes Usirng H^+ Ion Implantation Technique
- Ultrahigh-Vacuum Electron Cyclotron Resonance-Plasma Chemical-Vapor-Deposited SiN_x Films for X-Ray Lithography Mask Membrane : As-Deposited Properties and Radiation Stability
- Novel Evaluation System for Extreme Ultraviolet Lithography Resist in NewSUBARU
- Fine Pattern Replication Using ETS-1 Three-Aspherical Mirror Imaging System