Reduction of X-Ray Irradiation-Induced Pattern Displacement of SiN Membranes Usirng H^+ Ion Implantation Technique
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-12-30
著者
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YAMASHITA Yoshio
SORTEC Corporation
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Noda S
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Noda Shoji
Toyota Central Research And Development Labs
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Tsuboi S
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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Yoshida Yoichi
The Institute Of Scientific And Industrial Research Osaka University
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Yamada Yasusada
Advanced Research Institute Waseda University:advanced Science Research Center Japan Atomic Energy R
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Ohta Takayuki
Department Of Electronic Engineering Faculty Of Engineering Osaka University
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Yamashita Y
Power Supply Materials And Devices Laboratory Corporate R&d Center Toshiba Corporation
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Yamashita Yohachi
Corporate R&d Center Toshiba Corporation
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Yamashita Yohachi
Toshiba Materials & Devices Research Laboratories
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Noda S
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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Kasai Masanori
Oki Electric Industry Co. Ltd.
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Yamaguchi Yoh-ichi
Hoya Corporation
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TSUBOI Shinji
SORTEC Corporation
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OHTA Tsuneaki
Oki Electric Industry Co., Ltd.
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HOGA Hiroshi
Toppan Printing Co., Lid.
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ASHIKAGA Kinya
SORTEC Corporation
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NODA Syuichi
Oki Electric Industry Co., Ltd.
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HOGA Hiroshi
Oki Electric Industry Co., Ltd.
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Hoga Hiroshi
Oki Electric Industry Co. Ltd.
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Ohta Tsuneaki
Optoelectronics Joint Research Laboratory
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Ohta Tuneaki
Oki Electric Industry Co. Ltd.
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Ohta Tsuneaki
Oki Ekectric Industry Co. Ltd.
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Ohta Tsuneaki
Oki Electric Industry Co. Ltd.
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Noda Shuichi
Association Of Super-advanced Electronics Technologies (aset):(present Address)vlsi R&d Center O
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Noda Syuichi
Oki Electric Industry Co. Ltd.
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Yamashita Yoshio
Sortec Corporation:(present Address) Oki Electric Industry Co. Ltd.
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Yamashita Yasuharu
Synthetic Crystal Research Laboratory School Of Engineering Nagoya University
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Ohta T
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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Shoki T
Hoya Corp. Tokyo Jpn
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Shoki Tsutomu
Hoya Corporation Ngl Development Center
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Yamashita Y
Central Research Laboratory Hamamatsu Photonics K.k.
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Ohta Takeo
Tokyo-tokushukinzoku And Co
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