CF and CF_2 Radical Densities in 13.56-MHz CHF_3/Ar Inductively Coupled Plasma(Nuclear Science, Plasmas, and Electric Discharges)
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-01-15
著者
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Inoue M
Department Of Electrical Engineering Osaka Prefectural Technical College
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Inoue M
Osaka Inst. Technol. Osaka Jpn
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Inoue Mitsuteru
Department Of Electrical & Electronic Engineering. Toyohashi University Of Technology
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Inoue M
Setsunan Univ. Osaka Jpn
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Noda S
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Noda Shoji
Toyota Central Research And Development Labs
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Inoue Masami
Association Of Super-advanced Electronics Technologies (aset)
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Inoue M
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Inoue M
Kagoshima Univ. Kagoshima Jpn
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Inoue M
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Inoue M
Kyoto Univ. Kyoto Jpn
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Inoue Masumi
Department Of Quantum Engineering Nagoya University
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Noda S
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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Inoue Masataka
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Inoue M
Advanced Technology R&d Center Mitsubishi Electric Corp.
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INOUE Morio
Kyoto Research Laboratory, Matsushita Electronics Corporation
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Noda Shuichi
Association Of Super-advanced Electronics Technologies (aset):(present Address)vlsi R&d Center O
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Noda Syuichi
Oki Electric Industry Co. Ltd.
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NAKAGAWA Hideo
Association of Super-Advanced Electronics Technologies (ASET)
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OKIGAWA Mitsuru
Association of Super-Advanced Electronics Technologies (ASET)
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MORISHITA Satoshi
Association of Super-Advanced Electronics Technologies (ASET)
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NODA Syuichi
Association of Super-Advanced Electronics Technologies (ASET)
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HAYASHI Hisataka
Association of Super-Advanced Electronics Technologies (ASET)
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ITO Katsuyuki
Matsushita Electric Industrial Co., Ltd., Corporate Production Engineering Division
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SEKINE Makoto
Association of Super-Advanced Electronics Technologies (ASET)
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Hayashi H
Association Of Super-advanced Electronics Technologies (aset):(present Address)process & Manufac
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Sekine M
Association Of Super-advanced Electronics Technologies (aset):(present Address)process & Manufac
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Morishita Shunsuke
Association Of Super-advanced Electronics Technologies (aset):(present Address)advanced Technology R
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Ieda M
Department Of Electrical Engineering Nagoya University
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Okigawa Mitsuru
Association Of Super-advanced Electronics Technologies (aset):(present Address)system Lsi Division C
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Ito Katsuyuki
Matsushita Electric Industrial Co. Ltd. Corporate Production Engineering Division
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Ieda M
Department Of Electrical Engineering Nagoya University:(present Address) Department Of Electrical En
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Nakagawa Hideo
Association Of Super-advanced Electronics Technologies (aset):(present Address)ulsi Process Technolo
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