Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher : Etching and Deposition Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-01-31

著者

• Inoue M

  Department Of Electrical Engineering Osaka Prefectural Technical College

• Inoue M

  Osaka Inst. Technol. Osaka Jpn

• Okada H

  Univ. Toyama Toyama Jpn

• Inoue Masami

  Association Of Super-advanced Electronics Technologies (aset)

• Inoue Masumi

  Department Of Quantum Engineering Nagoya University

• Inoue M

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• INOUE Morio

  Kyoto Research Laboratory, Matsushita Electronics Corporation

• OKADA Hiroyuki

  Kyoto Research Laboratory, Matsushita Electronics Corporation

• Okada H

  Faculty Of Engineering University Of Toyama

• Inoue Morio

  Kyoto Research Laboratory Matsushita Electronics Corp.

• NAMURA Takashi

  Kyoto Research Lab., Matsushita Electronics Corp.

• TODOKORO Yoshihiro

  Kyoto Research Lab., Matsushita Electronics Corp.

• Namura T

  Kyoto Research Laboratory Matsushita Electronics Corporation

• Todokoro Y

  Kyoto Research Laboratory Matsushita Electronics Corporation

• Todokoro Yoshihiro

  Kyoto Research Lab. Matsushita Electronics Corporation

• NAITOH Yasushi

  VLSI Technokogy Research Lab., Matsushita Electric Industrial Co., Ltd

• Naitoh Yasushi

  Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.

• Okada Hiroyuki

  Kyoto Research Laboratory Matsushita Electronics Corporation

関連論文

• Preparation of Y-Ba-Cu-O Thin Films by the CVD Method in a Vacuum-Evaporation-Type Reactor
• Analysis of Acoustic Streaming in Nematic Liquid-Crystal Cell
• Optical Properties of Domain Pattern Induced in Nematic Liquid-Crystal Cell by Elastic Wave Propagation : Optical Properties of Condensed Matter
• Propagation Characteristics of Lamb Wave in Nematic Liquid-Crystal Cell
• Influence of Liquid-Crystal Directors in an Electric Field on Elastic Wave Propagating in Liquid-Crystal Cell
• Viscosity Measurement of Nematic Liquid Crystal Using Shear Horizontal Wave Propagation in Liquid Crystal Cell
• Viscosity Measurement of Ferroelectric Liquid Crystal Using Shear Horizontal Wave Propagation in a Trilayer Structure
• Periodic Property of Domain in Nematic Liquid Crystal Induced by Elastic Wave
• Liquid Viscosity Measurement Using Plate Mode Shear Horizontal Waves on a Piezoelectric Ceramic Thin Plate
• Mechanical Model of Rotation Frame for Phase Stability and Molecular Conformation in Liquid Crystal System
• Low Operational Voltage of Organic Electroluminescent Devices with a High Bipolar Conducting Silole Derivative
• White Organic Electroluminescent Devices with Mixed Single Layer (Special Issue on Advanced Emissive Displays)
• Plasma-Wall Interactions in Dual Frequency Narrow-Gap Reactive Ion Etching System
• Mechanism of Radical Control in Capacitive RF Plasma for ULSI Processing
• Fabrication of InAs Single-Crystal Free-Standing Wires for the Study of Electron and Thermal Transport
• Indium Arsenide Quantum Wires Fabricated by Electron Beam Lithography and Wet-Chemical Etching
• Monte Carlo Simulation for Auger Depth Profiling of GaAs/AlAs Superlattice Structure by Ar^+ Ion Sputtering
• Auger Depth Profiles of a GaAs/AlAs Superlattice Structure Obtained with O^+_2 and Ar^+ Ion Sputtering
• Molecular Beam Epitaxial Growth of Al-doped ZnMgO Alloy Films for Modulation-doped ZnO/ZnMgO Heterostructures
• Piezoelectric Carrier Confinement by Lattice Mismatch at ZnO/Zn_Mg_O Heterointerface
• Complementary InAs n-Channel and GaSb p-Channel Quantum Well Heterojunction Field-Effect Transistors
• A New Concept of Isotope Separation Using Ion Cyclotron Resonance in a Magnetic Field Having a Radial Component
• Beam-Profile Control Using an Octupole Magnet
• Organic Bifunctional Devices with Emission and Sensing Abilities
• Organic Multi-Function Diodes Operable for Emission and Photo detection Modes
• Top-Absorption Organic Photodiodes Suitable for Device Integration
• Organic Bi-function Matrix Array
• Top-Absorption Organic Photodiodes Suitable for Device Integration
• Organic Bi-Function Matrix Array
• Diminution of Micro-Eddy-Current Losses in Magneto-Surface-Acoustic-Wave Propagation Utilizing Multilayered Magnetostrictive Film Separated by Insulating Layers : SAW and Communication Devices
• BGS-type Magneto-Surface-Acoustic-Wave Devices Utilizing Horizontally Polarized PZT-Substrates : SAW and Communication Devices
• Effect of Eddy Current Loss on the Propagation Properties of Magneto-Surface-Acoustic-Waves in Highly Magnetostrictive Alloy Film Deposited on Glass Substrate : SAW and Communication Devices
• Magnetoelastic Wave Excitation Properties of Amorphous Iron-Boron Films Prepared by RF-High Rate Sputtering
• Build-on technology of bidirectional optical communication system using bifunctional organic diodes (Special issue: Solid state devices and materials)
• Organic field-effect transistor integrated circuits using self-alignment process technology (Special issue: Solid state devices and materials)
• Organic Field-Effect Transistor Integrated Circuits using Self-Alignment Process Technology
• Build-on Technology of Bi-Directional Optical Communication System using Bi-Functional Organic Diodes
• Durability Test of Solution-Processed Organic Electrophosphorescent Devices with Small Organic Molecules
• Synthesis and Carrier-transporting Properties of 5,10-Dihydro-5,5-dimethyl-10,10-diphenyl-1,9-diazasilanthrene
• Dual Drive and Emission Panel
• Sprayed Organic Electrophosphorescent Devices with Small Organic Molecules
• Improved Light Outcoupling in Organic Electroluminescent Devices with Random Dots
• Self-Alignment Technologies of Organic Electronic Devices and Its Integrated Panels
• Self-Aligned Bank Formation of Organic Electroluminescent Devices Using Ink-Jet Printing Method
• White Organic Electroluminescent Devices Fabricated Using Ink-Jet Printing Method
• Temperature Dependence of Physical Constants with Varied Molecular Length and Position of Fluorine Substituents in Phenyl-bicyclohexane Core Liquid Crystals
• Model Test of Biperiodic L-support Disk-and-Washer Linac Structure
• Absolute Scintillation Yields in Liquid Argon and Xenon for Various Particles
• Time and Energy Responses of Liquid-Xenon Scintillation Chamber for ^Ne Ion Beam at 135A MeV
• Allene-Doped Liquid Ar Homogeneous Calorimeter for Measurement of Heavy Ion Fragmentation
• Phase-Sensitive Optical Probe for Surface Acoustic Wave Soliton Investigation
• Experimental Studies on Nonlinear Dispersive Surface Acoustic Waves for Solitons
• Reconstruction of Three-Dimensional Images of Surface Acoustic Waves by Means of Computer-Controlled Laser Probe
• Interface-Treated Josephson Junctions in Trilayer Structures
• Novel Nanofabrication Process for InAs/AlGaSb Heterostructures Utilizing Atomic Force Microscope Oxidation
• Coulomb Blockade Observed in InAs/AlGaSb Nanostructures Produced by an Atomic Force Microscope Oxidation Process
• Atomic Force Microscope Nanofabrication of InAs/AlGaSb Heterostructures ( Quantum Dot Structures)
• Error Detection by Digital Watermarking for MPEG-4 Video Coding(Special Section on Papers Selected from ITC-CSCC 2001)
• Characteristics of Polycrystalline ZnO-Based Electrolyte-Solution-Gate Field-Effect Transistors Fabricated on Glass Substrates
• Charge-storage Effect of Vertically Stacked InAs Nanodots Embedded in AI_Ga_As Matrix
• CF and CF_2 Radical Densities in 13.56-MHz CHF_3/Ar Inductively Coupled Plasma(Nuclear Science, Plasmas, and Electric Discharges)
• Planarization of the Yba_2Cu_3O_ Base Electrodes in Trilayer Josephson Junctions : Superconductors
• Lamb Wave Propagation Characteristics and Transducer Performances in Layered Substrate Composed of Piezoelectric Thin Plate and Glass Thin Plate
• Characteristics of Self-Assembled InSb Dots Grown on (100) AlGaSb by Molecular Beam Epitaxy
• Monitoring of Electron Energy Distribution Change from Optical Emission for Nonmagnetic Ultrahigh-Frequency Plasma
• Analysis of Overlay Accuracy in 0.14μm Device Fabrication using Synchrotron Radiation Lithography
• Increased Electron Concentration in InAs/AlGaSb Heterostructures Using a Si Planar Doped Ultrathin InAs Quantum Well
• Oxide-Voltage and Its Polarity Dependence of Interface-State-Generation Efficiency in (100) n-Si Metal/Oxide/Semiconductor Capacitors
• Capture Cross Section of Electric-Stress-Induced Interface States in (100) Si Metal/Oxide/Semiconductor Capacitors
• Surface Structure of Zr-O/W(100) System at 1700 K
• Anomaly in Sputtering on Titanium Nitride Film Growth by Post-Irradiation Processing
• Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film
• Work Function Change Measured by Electron Beam Chopping Technique as Applied to Oxygen-Adsorbed W(100) at High Temperature
• Ion-Assisted Crystal Growth by Post Irradiation as Applied to Nitride Formatiorn
• Characterization of Ion Implantation Dose by Raman Scattering and Photothermal Wave Techniques
• Secondary Defects of As^+ Implanted Silicon Measured by Thermal Wave Technique
• Electro-Optic Responses of Antiferroelectric Liquid Crystals with Very Short Reverse Pulse Voltage
• Evaluation of Device Charging in Ion Implantation : Ion Beam Process
• Evaluation of Device Charging in Ion Implantation
• Synthesis and Properties of 9, 9'-Diaryl-4, 5-diazafluorenes. A New Type of Electron-Transporting and Hole-Blocking Material in EL Device
• Study on Luminescence of Organic Thin Films Using Field Emitter Arrays (第5回日韓台中情報ディスプレイ合同研究会(ASID '99)) -- (Organic LED)
• Study on Luminescence of Organic Thin Films Using Field Emitter Arrays
• A Study on the Potential Structure of the Barrier in Ba_K_xBiO_3/Natural-Barrier/Au Structures
• Fully Self-Aligned Amorphous-Silicon MUS Transistors
• Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode
• Organic Electroluminescent Devices Using a Mixed Single Layer
• Detection and Printability of Shifter Defects in Phase-Shifting Masks II. : Defocus Characteristics
• Detection and Printability of Shifter Defects in Phase-Shifting Masks : Photolithography
• Pattern Transfer Characteristics of Transparent Phase Shifting Mask : Photolithography
• Detection and Printability of Shifter Defects in Phase-Shifting Masks
• Pattern Transfer Characteristics of Transparent Phase Shifting Mask
• Charge Buildup in Magnetized Process Plasma
• Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher : Etching and Deposition Technology
• Thermodynamics of Development Process of Positive Resists in Binary Mixed Developer : Resist Material and Process
• A DUV-Defined-Negative Resist/EB-Defined-positive Resist Two-Layer Resist System for the Fabrication of T-Shaped Gate : Lithography Technology
• A DUV-Defined-Negative Resist/EB-Defined-Positive Resist Two-Layer Resist System for the Fabrication of T-Shaped Gate
• Thermodynamics of Development Process of Positive Resists in Binary Mixed Developer
• Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher
• Reflectioru High Energy Electron Diffraction Observation of Dynamic Ion Beam Mixing Process in Titanium Nitride Crystal Growth
• Deposition of Y-Ba-Cu-O Thin Films by RF Magnetron Sputtering with a Grid Electrode: Plasma Parameters

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