Detection and Printability of Shifter Defects in Phase-Shifting Masks
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概要
- 論文の詳細を見る
Because of the high printability of shifter defects in phase-shifting masks, it is worthwhile to characterize the inspection and printing of the shifter defects. The detectability and printability of shifter defects as a function of size and location have been investigated by experiments and simulation. A test mask with various programmed shifter defects was inspected by means of a die-to-die inspection system and printed in positive resist with an i-line stepper. Corner defects are difficult to detect and have low printability. A defect located in small features has high printability. We have also investigated the detectability and printability of the phase angle defects which have phase angles other than 180°. Defects with 120° to 180° phase angles have high printability. Defects with phase angles below 90° are not printed.
- 社団法人応用物理学会の論文
- 1991-11-30
著者
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Inoue M
Department Of Electrical Engineering Osaka Prefectural Technical College
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Inoue M
Osaka Inst. Technol. Osaka Jpn
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Inoue Masami
Association Of Super-advanced Electronics Technologies (aset)
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Inoue Masumi
Department Of Quantum Engineering Nagoya University
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Watanabe Hirohito
Institute Of Material Science University Of Tsukuba
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Watanabe H
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Inoue M
Advanced Technology R&d Center Mitsubishi Electric Corp.
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INOUE Morio
Kyoto Research Laboratory, Matsushita Electronics Corporation
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Inoue Morio
Kyoto Research Laboratory Matsushita Electronics Corp.
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TODOKORO Yoshihiro
Kyoto Research Lab., Matsushita Electronics Corp.
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WATANABE Hisashi
Kyoto Research Laboratory, Matsushita Electronics Co
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Todokoro Y
Kyoto Research Laboratory Matsushita Electronics Corporation
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Todokoro Yoshihiro
Kyoto Research Lab. Matsushita Electronics Corporation
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