Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode
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概要
- 論文の詳細を見る
Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a c-axis orientation were obtained, while the films prepared without the grid electrode but under the same condition showed neither superconductivity nor c-axis crystal orientation.
- 社団法人応用物理学会の論文
- 1989-03-20
著者
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INOUE Masumi
Department of Electronics Engineering, Nagoya University
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TAKAI Yoshiaki
Department of Electronics Engineering, Nagoya University
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HAYAKAWA Hisao
Department of Electronics Engineering, Nagoya University
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Inoue M
Department Of Electrical Engineering Osaka Prefectural Technical College
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Inoue M
Osaka Inst. Technol. Osaka Jpn
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Ohbayashi K
Hiroshima Univ. Hiroshima
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Inoue Masami
Association Of Super-advanced Electronics Technologies (aset)
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Inoue Masumi
Department Of Quantum Engineering Nagoya University
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Takai Yoshiaki
Nagoya University
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Inoue M
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Takechi Kimihiro
Department Of Electrical And Electronic Engineering Faculty Of Engineering Ehime University
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Inoue Masumi
Department Of Cell And System Physiology University Of Occupational And Environmental Health School
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早川 尚男
京都大学大学院人間・環境学研究科
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Hayakawa H
Nagoya Univ. Nagoya Jpn
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Takechi K
Functional Devices Research Laboratories Nec Corporation
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TAKECHI Kazushige
Department of Electronics, Nagoya University
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SHIOTA Tetsuyoshi
Department of Electronics Engineering, Nagoya University
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HATOU Tsunehiro
Department of Electronics Engineering, Nagoya University
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OHBAYASHI Kazushige
NGK Spark Plug Co. Ltd.
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Shiota Tetsuyoshi
Department Of Electronics Faculty Of Engineering Nagoya University
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Hatou Tsunehiro
Department Of Electronics Engineering Nagoya University
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Takai Yoshiaki
Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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