Possibility of High Deposition Rate in SmBa2Cu3Oy Films Prepared Using the Vapor–Liquid–Solid Growth Mode
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概要
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The vapor–liquid–solid (VLS) growth mode is expected to achieve high-quality REBa2Cu3Oy thin films at a high growth rate since it is almost identical to the liquid phase epitaxy (LPE) growth mode. We studied the effect of the deposition rate on superconductivity in SmBa2Cu3Oy (Sm123) thin films prepared using the VLS growth mode. The VLS-Sm123 films as well as that deposited by pulsed laser deposition (PLD) under optimal conditions had completely $c$-axis orientation and maintained high crystallinity. Critical temperatures were around 90 K and independent of the deposition rate. However, critical current densities increased with the deposition rate and reached over 1 MA/cm2 at 77 K. In this study, a maximum deposition rate of 320 nm/min was achieved; this was thirty times as high as that obtained by PLD. We propose that a deposition rate as high as that obtained by LPE can be achieved by the VLS growth mode.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-02-15
著者
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TAKAI Yoshiaki
Department of Electronics Engineering, Nagoya University
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Ichinose Ataru
Central Research Institute Of Electric Power Industry
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MUKAIDA Masashi
Department of Electrical and Information Engineering, Yamagata University
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Ichino Yusuke
Department Of Electronics Nagoya University
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Matsumoto Kaname
Department Of Materials Science And Engineering Kyushu Institute Of Technology
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Horii Shigeru
Department Of Applied Chemistry School Of Engineering University Of Tokyo
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Yoshida Yutaka
Deparlment Of Internal Medicine School Of Medicine Kobe University
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Matsuo Hisayoshi
Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Takai Yoshiaki
Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Ichinose Ataru
Central Research Institute of Electric Power Industry, Yokosuka, Kanagawa 201-8511, Japan
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Ichino Yusuke
Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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