Charge Buildup in Magnetized Process Plasma

スポンサーリンク

概要

• 論文の詳細を見る

• The charge buildup in a magnetron etcher has been studied experimentally for two different magnet arrangements and theoretically on the basis of an equivalent circuit model. Wafer charging measured with a metal-Si_3N_4-SiO_2-Si (MNOS) capacitor is negative along the centerline of the magnet poles and positive between the magnets in both cases. Wafer charging is explained either by curtent crowding at the center of the magnet poles or by the nonambipolar diffusion effect.

• 社団法人応用物理学会の論文
• 1991-07-15

著者

• Inoue M

  Department Of Electrical Engineering Osaka Prefectural Technical College

• Inoue M

  Osaka Inst. Technol. Osaka Jpn

• Okada H

  Univ. Toyama Toyama Jpn

• Inoue Masami

  Association Of Super-advanced Electronics Technologies (aset)

• Inoue Masumi

  Department Of Quantum Engineering Nagoya University

• Inoue M

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• INOUE Morio

  Kyoto Research Laboratory, Matsushita Electronics Corporation

• OKADA Hiroyuki

  Kyoto Research Laboratory, Matsushita Electronics Corporation

• Okada H

  Faculty Of Engineering University Of Toyama

• Inoue Morio

  Kyoto Research Laboratory Matsushita Electronics Corp.

• NAMURA Takashi

  Kyoto Research Lab., Matsushita Electronics Corp.

• TODOKORO Yoshihiro

  Kyoto Research Lab., Matsushita Electronics Corp.

• Namura T

  Kyoto Research Laboratory Matsushita Electronics Corporation

• Todokoro Y

  Kyoto Research Laboratory Matsushita Electronics Corporation

• Todokoro Yoshihiro

  Kyoto Research Lab. Matsushita Electronics Corporation

• NAITOH Yasushi

  Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.

• Naitoh Yasushi

  Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.

• Okada Hiroyuki

  Kyoto Research Laboratory Matsushita Electronics Corporation

関連論文

• Preparation of Y-Ba-Cu-O Thin Films by the CVD Method in a Vacuum-Evaporation-Type Reactor
• Analysis of Acoustic Streaming in Nematic Liquid-Crystal Cell
• Optical Properties of Domain Pattern Induced in Nematic Liquid-Crystal Cell by Elastic Wave Propagation : Optical Properties of Condensed Matter
• Propagation Characteristics of Lamb Wave in Nematic Liquid-Crystal Cell
• Influence of Liquid-Crystal Directors in an Electric Field on Elastic Wave Propagating in Liquid-Crystal Cell
• Viscosity Measurement of Nematic Liquid Crystal Using Shear Horizontal Wave Propagation in Liquid Crystal Cell
• Viscosity Measurement of Ferroelectric Liquid Crystal Using Shear Horizontal Wave Propagation in a Trilayer Structure
• Periodic Property of Domain in Nematic Liquid Crystal Induced by Elastic Wave
• Liquid Viscosity Measurement Using Plate Mode Shear Horizontal Waves on a Piezoelectric Ceramic Thin Plate
• Mechanical Model of Rotation Frame for Phase Stability and Molecular Conformation in Liquid Crystal System
• Low Operational Voltage of Organic Electroluminescent Devices with a High Bipolar Conducting Silole Derivative
• White Organic Electroluminescent Devices with Mixed Single Layer (Special Issue on Advanced Emissive Displays)
• Plasma-Wall Interactions in Dual Frequency Narrow-Gap Reactive Ion Etching System
• Mechanism of Radical Control in Capacitive RF Plasma for ULSI Processing
• Fabrication of InAs Single-Crystal Free-Standing Wires for the Study of Electron and Thermal Transport
• Indium Arsenide Quantum Wires Fabricated by Electron Beam Lithography and Wet-Chemical Etching
• Monte Carlo Simulation for Auger Depth Profiling of GaAs/AlAs Superlattice Structure by Ar^+ Ion Sputtering
• Auger Depth Profiles of a GaAs/AlAs Superlattice Structure Obtained with O^+_2 and Ar^+ Ion Sputtering
• Molecular Beam Epitaxial Growth of Al-doped ZnMgO Alloy Films for Modulation-doped ZnO/ZnMgO Heterostructures
• Piezoelectric Carrier Confinement by Lattice Mismatch at ZnO/Zn_Mg_O Heterointerface
• Complementary InAs n-Channel and GaSb p-Channel Quantum Well Heterojunction Field-Effect Transistors
• A New Concept of Isotope Separation Using Ion Cyclotron Resonance in a Magnetic Field Having a Radial Component
• Beam-Profile Control Using an Octupole Magnet
• Organic Bifunctional Devices with Emission and Sensing Abilities
• Organic Multi-Function Diodes Operable for Emission and Photo detection Modes
• Top-Absorption Organic Photodiodes Suitable for Device Integration
• Organic Bi-function Matrix Array
• Top-Absorption Organic Photodiodes Suitable for Device Integration
• Organic Bi-Function Matrix Array
• Diminution of Micro-Eddy-Current Losses in Magneto-Surface-Acoustic-Wave Propagation Utilizing Multilayered Magnetostrictive Film Separated by Insulating Layers : SAW and Communication Devices
• BGS-type Magneto-Surface-Acoustic-Wave Devices Utilizing Horizontally Polarized PZT-Substrates : SAW and Communication Devices
• Effect of Eddy Current Loss on the Propagation Properties of Magneto-Surface-Acoustic-Waves in Highly Magnetostrictive Alloy Film Deposited on Glass Substrate : SAW and Communication Devices
• Magnetoelastic Wave Excitation Properties of Amorphous Iron-Boron Films Prepared by RF-High Rate Sputtering
• Build-on technology of bidirectional optical communication system using bifunctional organic diodes (Special issue: Solid state devices and materials)
• Organic field-effect transistor integrated circuits using self-alignment process technology (Special issue: Solid state devices and materials)
• Organic Field-Effect Transistor Integrated Circuits using Self-Alignment Process Technology
• Build-on Technology of Bi-Directional Optical Communication System using Bi-Functional Organic Diodes
• Durability Test of Solution-Processed Organic Electrophosphorescent Devices with Small Organic Molecules
• Synthesis and Carrier-transporting Properties of 5,10-Dihydro-5,5-dimethyl-10,10-diphenyl-1,9-diazasilanthrene
• Dual Drive and Emission Panel
• Sprayed Organic Electrophosphorescent Devices with Small Organic Molecules
• Improved Light Outcoupling in Organic Electroluminescent Devices with Random Dots
• Self-Alignment Technologies of Organic Electronic Devices and Its Integrated Panels
• Self-Aligned Bank Formation of Organic Electroluminescent Devices Using Ink-Jet Printing Method
• White Organic Electroluminescent Devices Fabricated Using Ink-Jet Printing Method
• Temperature Dependence of Physical Constants with Varied Molecular Length and Position of Fluorine Substituents in Phenyl-bicyclohexane Core Liquid Crystals
• Model Test of Biperiodic L-support Disk-and-Washer Linac Structure
• Absolute Scintillation Yields in Liquid Argon and Xenon for Various Particles
• Time and Energy Responses of Liquid-Xenon Scintillation Chamber for ^Ne Ion Beam at 135A MeV
• Allene-Doped Liquid Ar Homogeneous Calorimeter for Measurement of Heavy Ion Fragmentation
• Phase-Sensitive Optical Probe for Surface Acoustic Wave Soliton Investigation
• Experimental Studies on Nonlinear Dispersive Surface Acoustic Waves for Solitons
• Reconstruction of Three-Dimensional Images of Surface Acoustic Waves by Means of Computer-Controlled Laser Probe
• Interface-Treated Josephson Junctions in Trilayer Structures
• Novel Nanofabrication Process for InAs/AlGaSb Heterostructures Utilizing Atomic Force Microscope Oxidation
• Coulomb Blockade Observed in InAs/AlGaSb Nanostructures Produced by an Atomic Force Microscope Oxidation Process
• Atomic Force Microscope Nanofabrication of InAs/AlGaSb Heterostructures ( Quantum Dot Structures)
• Error Detection by Digital Watermarking for MPEG-4 Video Coding(Special Section on Papers Selected from ITC-CSCC 2001)
• Characteristics of Polycrystalline ZnO-Based Electrolyte-Solution-Gate Field-Effect Transistors Fabricated on Glass Substrates
• Charge-storage Effect of Vertically Stacked InAs Nanodots Embedded in AI_Ga_As Matrix
• CF and CF_2 Radical Densities in 13.56-MHz CHF_3/Ar Inductively Coupled Plasma(Nuclear Science, Plasmas, and Electric Discharges)
• Planarization of the Yba_2Cu_3O_ Base Electrodes in Trilayer Josephson Junctions : Superconductors
• Lamb Wave Propagation Characteristics and Transducer Performances in Layered Substrate Composed of Piezoelectric Thin Plate and Glass Thin Plate
• Characteristics of Self-Assembled InSb Dots Grown on (100) AlGaSb by Molecular Beam Epitaxy
• Monitoring of Electron Energy Distribution Change from Optical Emission for Nonmagnetic Ultrahigh-Frequency Plasma
• Analysis of Overlay Accuracy in 0.14μm Device Fabrication using Synchrotron Radiation Lithography
• Increased Electron Concentration in InAs/AlGaSb Heterostructures Using a Si Planar Doped Ultrathin InAs Quantum Well
• Oxide-Voltage and Its Polarity Dependence of Interface-State-Generation Efficiency in (100) n-Si Metal/Oxide/Semiconductor Capacitors
• Capture Cross Section of Electric-Stress-Induced Interface States in (100) Si Metal/Oxide/Semiconductor Capacitors
• Surface Structure of Zr-O/W(100) System at 1700 K
• Anomaly in Sputtering on Titanium Nitride Film Growth by Post-Irradiation Processing
• Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film
• Work Function Change Measured by Electron Beam Chopping Technique as Applied to Oxygen-Adsorbed W(100) at High Temperature
• Ion-Assisted Crystal Growth by Post Irradiation as Applied to Nitride Formatiorn
• Characterization of Ion Implantation Dose by Raman Scattering and Photothermal Wave Techniques
• Secondary Defects of As^+ Implanted Silicon Measured by Thermal Wave Technique
• Electro-Optic Responses of Antiferroelectric Liquid Crystals with Very Short Reverse Pulse Voltage
• Evaluation of Device Charging in Ion Implantation : Ion Beam Process
• Evaluation of Device Charging in Ion Implantation
• Synthesis and Properties of 9, 9'-Diaryl-4, 5-diazafluorenes. A New Type of Electron-Transporting and Hole-Blocking Material in EL Device
• Study on Luminescence of Organic Thin Films Using Field Emitter Arrays (第5回日韓台中情報ディスプレイ合同研究会(ASID '99)) -- (Organic LED)
• Study on Luminescence of Organic Thin Films Using Field Emitter Arrays
• A Study on the Potential Structure of the Barrier in Ba_K_xBiO_3/Natural-Barrier/Au Structures
• Fully Self-Aligned Amorphous-Silicon MUS Transistors
• Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode
• Organic Electroluminescent Devices Using a Mixed Single Layer
• Detection and Printability of Shifter Defects in Phase-Shifting Masks II. : Defocus Characteristics
• Detection and Printability of Shifter Defects in Phase-Shifting Masks : Photolithography
• Pattern Transfer Characteristics of Transparent Phase Shifting Mask : Photolithography
• Detection and Printability of Shifter Defects in Phase-Shifting Masks
• Pattern Transfer Characteristics of Transparent Phase Shifting Mask
• Charge Buildup in Magnetized Process Plasma
• Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher : Etching and Deposition Technology
• Thermodynamics of Development Process of Positive Resists in Binary Mixed Developer : Resist Material and Process
• A DUV-Defined-Negative Resist/EB-Defined-positive Resist Two-Layer Resist System for the Fabrication of T-Shaped Gate : Lithography Technology
• A DUV-Defined-Negative Resist/EB-Defined-Positive Resist Two-Layer Resist System for the Fabrication of T-Shaped Gate
• Thermodynamics of Development Process of Positive Resists in Binary Mixed Developer
• Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher
• Reflectioru High Energy Electron Diffraction Observation of Dynamic Ion Beam Mixing Process in Titanium Nitride Crystal Growth
• Deposition of Y-Ba-Cu-O Thin Films by RF Magnetron Sputtering with a Grid Electrode: Plasma Parameters

もっと見る 閉じる

スポンサーリンク