Anomaly in Sputtering on Titanium Nitride Film Growth by Post-Irradiation Processing

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-01-15

著者

• Inoue M

  Department Of Electrical Engineering Osaka Prefectural Technical College

• Inoue M

  Osaka Inst. Technol. Osaka Jpn

• Inoue M

  Setsunan Univ. Osaka Jpn

• Min K‐y

  Department Of Applied Physics Osaka University

• Inoue Masami

  Association Of Super-advanced Electronics Technologies (aset)

• Inoue Masahiko

  Department Of Neurology Showa University Fujigaoka Hospital

• Inoue M

  Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn

• Inoue M

  Nanomaterials Microdevices Research Center Osaka Institute Of Technology

• Inoue M

  Kyoto Univ. Kyoto Jpn

• Inoue Masumi

  Department Of Quantum Engineering Nagoya University

• SHIMIZU Ryuichi

  Department of Applied Physics, Osaka University

• Inoue Masataka

  Nanomaterials Microdevices Research Center Osaka Institute Of Technology

• Inoue M

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• MITSUHASHI Riichirou

  Department of Applied Physics, Faculty of Engineering, Osaka University

• MIN Kyung-Youl

  Department of Applied Physics, Faculty of Engineering, Osaka University

• SUZUKI Yosuke

  Department of Applied Physics, Osaka University

• HOHMANN Siegfried

  Department of Applied Physics, Osaka University

• Souda R

  National Institute For Research In Inorganic Materials

• Min Kyung-youl

  Department Of Applied Physics Osaka University

• Shimizu R

  Department Of Information Science Osaka Institute Of Technology

• Shimizu R

  Osaka Univ. Osaka Jpn

• Shimizu Ryuichi

  Department Of Applied Physics Faculty Of Engineering Osaka University

• Mitsuhashi R

  Department Of Applied Physics Graduate School Of Engineering Osaka University

• Mitsuhashi Riichirou

  Department Of Applied Physics Faculty Of Engineering Osaka University

• Hohmann Siegfried

  Department Of Applied Physics Osaka University:(present Address)max-plank-institut Fur Metallforshun

• Inoue Masahiko

  Department Of Applied Physics Faculty Of Engineering Osaka University

• Suzuki Yosuke

  Department Of Applied Physics Osaka University

• Shimizu Ryuichi

  Department Of Applied Physics Faculty Engineering Osaka University

• Shimizu Ryuichi

  Department of Information Processing, Osaka Institute of Technology

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