Initial Stage of Preferential Sputtering in Cu-Pt Alloy Studied by Sputtered Neutrals Mass Spectrometry
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概要
- 論文の詳細を見る
Nonresonant multiphoton ionization sputtered neutrals mass spectrometry (NRMPI-SNMS) was used to measure a codeposited Cu-Pt alloy film to elucidate how preferential sputtering proceeds with ion bombardment. For this, we have newly developed a compact coevaporator which enables preparation of Cu-Pt alloy film of homogeneous composition from the surface to the bulk in a specimen chamber. The present study has revealed that the ratio of sputtered Cu atoms to Pt atoms is 〜9.3 at the very initial stage of sputtering for a Cu-Pt alloy surface of which surface composition under ion bombardment is assessed to be Cu(88 at. %)-Pt at the topmost surface together with by the successive atomic layers of homogeneous composition of Cu(68.2 at. %)-Pt. This result has clearly indicated that Cu atoms are preferentially sputtered through atomic collisions caused entirely by the kinetic process of sputtering.
- 社団法人応用物理学会の論文
- 1994-10-15
著者
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Inoue Masahiko
Department Of Neurology Showa University Fujigaoka Hospital
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KUNITOMO Shinta
Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Asahata Tatsuya
Department Of Applied Physics Faculty Of Engineering Osaka University
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Kunitomo Shinta
Department Of Applied Physics Faculty Of Engineering Osaka University
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Inoue Masahiko
Department Of Applied Physics Faculty Of Engineering Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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