Energy Distributions of Atoms Sputtered from Cu-Pt Alloy Measured by Nonresonarut Multiphoton Ionization Sputtered Neutrals Mass Spectrometry
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概要
- 論文の詳細を見る
Energy distributions of sputtered Cu and Pt atoms from monoatomic and Cu-Pt (55 at.%) alloy samples under Ar^+ ion bombardment were measured using an sputtered neutrals mass spectrometry (SNMS) instrument in nonresonant multiphoton ionization. The distributions for the pure Cu and Pt samples agreed very well with the theoretical distribution derived by Thompson [Philos. Mag. 18 (1968)377], while considerable deviation was found in the distributions of Pt atoms from the Cu-Pt alloy, particularly at lower energy. The results have also revealed that the peak position, which reflects the surface binding energy according to Thompson's theoretical expression, of the energy distribution of Pt atoms from the alloy is 〜0.6 eV lower than that of the Pt atom energy distribution from the pure Pt sample.
- 社団法人応用物理学会の論文
- 1993-09-15
著者
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Li Chun
Department Of Applied Physics Faculty Of Engineering Osaka University
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KUNITOMO Shinta
Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Ono Masahiro
Department Of Applied Physics Faculty Of Engineering Osaka University
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Kunitomo S
Osaka Univ. Osaka
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Kunitomo Shinta
Department Of Applied Physics Faculty Of Engineering Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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