Accumulation Effect of Bombarding N^+_2 Ions in Al for Crystal Growth of AlN Film
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-05-15
著者
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SHIMIZU Ryuichi
Department of Applied Physics, Osaka University
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BEAG Young
Department of Applied Physics, Osaka University
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MITSUHASHI Riichirou
Department of Applied Physics, Faculty of Engineering, Osaka University
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Beag Y
Department Of Applied Physics Graduate School Of Engineering Osaka University
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Beag Young
Department Of Applied Physics Osaka University
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Souda R
National Institute For Research In Inorganic Materials
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Shimizu R
Department Of Information Science Osaka Institute Of Technology
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Shimizu R
Osaka Univ. Osaka Jpn
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Mitsuhashi R
Department Of Applied Physics Graduate School Of Engineering Osaka University
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Mitsuhashi Riichirou
Department Of Applied Physics Faculty Of Engineering Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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Shimizu Ryuichi
Department of Information Processing, Osaka Institute of Technology
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