A Stable High-Brightness Electron Gun with Zr/W-tip for Nanometer Lithography. : I. Emission Properties in Schottky- and Thermal Field-Emission Regions
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概要
- 論文の詳細を見る
A Zr/W-tip consisting of a (100)-oriented tungsten emitter with an overlayer of zirconium was mounted in a new electron gun system designed for the basic study of nanometer lithography, and the emission properties of the tip were investigated. The tip performed excellently, exhibiting a brightness of〜2×10^8 A/(cm^2 sr) at 50 kV, a current stability ofless than 0.2%/h, and an angular current density of〜3.4mA/sr at 20 kV.The work function of the Zr/W-tip operating in the Schottky emission region was roughly estimated as 3.2 eV.
- 社団法人応用物理学会の論文
- 1985-06-20
著者
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Namba S
Inst. Physical And Chemical Research Wako
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Namba Susumu
Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University
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Namba Susumu
Nagasaki Institute Of Applied Science
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Gamo Kenji
Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University
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Namba Susumu
Frontier Research Program Riken
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SHIMIZU Ryuichi
Faculty of Engineering, Osaka University
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Shimizu R
Osaka Univ. Osaka Jpn
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Nagatomo S
Shizuoka Univ. Shizuoka Jpn
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Tamura N
Ritsumeikan Univ. Shiga Jpn
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Hashimoto Hatsujiro
Faculty Of Engineering Okayama University Of Science
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SAMOTO Norihiko
Photonic and Wireless Devices Research Labs., NEC Corporation
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Namba Susumu
Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University
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SAMOTO Norihiko
Faculty of Engineering, Osaka University
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TAMURA Nobuaki
JEOL Co.,
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Samoto N
Kansai Electronics Research Laboratories Nec Corporation
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Shimizu Ryuichi
Faculty Of Engineering Osaka University
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