Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam excited Plasma(EBEP) System : Etching and Deposition Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1989-12-30

著者

• Namba S

  Inst. Physical And Chemical Research Wako

• HARA Tamio

  Toyota Technological Institute

• Aoyagi Y

  Inst. Physics And Chemical Res. (riken) Wako Jpn

• Aoyagi Y

  Semiconductor Laboratory Riken The Institute For Physical And Chemical Research

• Hara T

  Toyota Technological Inst. Nagoya Jpn

• Masui Norio

  Faculty Of Engineering Science Osaka University

• Namba Susumu

  Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University

• Namba Susumu

  Nagasaki Institute Of Applied Science

• GAMO Kenji

  Faculty of Engineering Science, Osaka University

• YUBA Yoshihiko

  Faculty of Engineering Science, Osaka University

• Aoyagi Yoshinobu

  Riken

• Gamo Kenji

  Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University

• HAMAGAKI Manabu

  RIKEN, The Institute of Physical and Chemical Research

• HARA Tamio

  RIKEN, The Institute of Physical and Chemical Research

• Yuba Yoshihiko

  Faculty Of Engineering Science Osaka University

• Aoyagi Yoshinobu

  Nanoelectronic Materials Laboratory Frontier Research Program Riken

• Aoyagi Y

  The Institute Of Physical And Chemical Research

• Namba Susumu

  Research Center For Extreme Materials And Department Of Electrical Engineering Osaka University

• Namba Susumu

  Frontier Research Program Riken

• Jin-Zhong YU

  Institute of Semicinductors, Chinese Academy of Sciences

• NAMBU Susumu

  Faculty of Engineering Science, Osaka university

• Hamagaki M

  The Institute Of Physical And Chemical Research (riken)

• Hamagaki Manabu

  Akashi Technical Institute Kawasaki Heavy Industries

• Jin-zhong Yu

  Institute Of Semicinductors Chinese Academy Of Sciences

• Nagatomo S

  Shizuoka Univ. Shizuoka Jpn

• Hamagaki Manabu

  Riken

• Namba S

  Riken The Institute Of Physical And Chemical Research

• NAMBA Susumu

  Research Center for Extreme Materials and Department of Electrical Engineering, Osaka University

関連論文

• Dotted-Array Plasma Production by Using a Line-Focusing Lens System with Segmented Prism Array for Compact X-ray Laser Experiments
• Demonstration of X-Ray Amplification in an X-Ray Laser Cavity Pumped by a Pulse-Train Yttrium Aluminium Garnet Laser
• Debris from High-Aspect-Ratio Rectangular Focused Laser Irradiation on a Tape Target Surface in an X-Ray Laser System
• Observation of Gain and Double-pass Amplification of Li-like Al Soft X-ray Transitions in a Recombining Plasma Pumped by a Pulse-train YAG Laser
• Reflow of PSG Layers by Halogen Lamp Short Duration Heating Technique
• Contact Resistance of Al/Si Ohmic Electrodes Formed by Rapid Lamp Sintering.
• Measurements of Spatial Coherence of Recombination X-Ray Laser
• Flash-Lamp-Pumped Tunable Ti:BeAl_2O_4 Laser
• Passive Mode Locking of a Flashlamp-Pumped Ti:Sapphire Laser
• Flash Lamp Pumped Tunable Forsterite Laser
• Optical Properties and Lasing of Ti^ Doped BeAl_2O_4
• Effects of Heat Treatment on the Sensitivity of Warm Carrier Devices for CH_3OH Laser Radiation
• Thin-Film Long-Wire Antenna for 10.6 μm CO_2 Laser Radiation
• Modeling of Electron Transport in Corrugated Quantum Wires
• Ballistic Weak Localization and Wave Function Scarring in Quantum Wires
• Low-Energy Ion-Beam Irradiation Effects on Two-Dimensional Electron Gas in Modulation-Doped AlGaAs/ GaAs Heterostructure : Micro/nanofabrication and Devices
• Low-Energy Ion-Beam Irradiation Effects on Two-Dimensional Electron Gas in Modulation-Doped AlGaAs/GaAs Heterostructure
• Anderson Localization and Universal Conductance Fluctuations with Spin-Orbit Interactions in δ-Doped GaAs Films and Wires
• Magnetic Analysis of Quadrupole Lens for MeV Ion Microprobe
• Three-Dimensional Analysis of Locally Implanted Atoms by MeV Helium Ion Microprobe
• Etching Rate Control by MeV O^+ Implantation for Laser-Chemical Reaction of Ferrite : Beam-Induced Physics and Chemistry
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• Local Control of Magnetic Property in Stainless Steel Surface by Ion and Laser Beams
• Etching Rate Control by MeV O^+ Implantation for Laser-Chemical Reaction of Ferrite
• Tomography of Microstructures by Scanning Micro-RBS Probe
• Optimization in Spot Sizes of Focused MeV Ion Beam by Precise Adjustment of Lens-Current Excitations : Nuclear Science, Plasmas and Electric Discharges
• Is There a Magnetic-Field-Induced Breakdown in the Universality of Conductance Fluctuations?
• Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation : Microfabrication and Physics
• Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation
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• 30 nm Line Fabrication on PMMA Resist by Fine Focused Be Ion Beam
• Electronic Properties of Polysilane Calculated with the Real-Time Real-Space Higher-Order Finite-Difference Method
• Fast Algorithm for Calculating Two-Photon Absorption Spectra by Real-Time Real-Space Higher-Order Finite-Difference Method
• Laser-Induced Etching of Mn-Zn ferrite and Its Application : Etching and Deposition Technology
• Probing the Discrete Level Spectrum of Open Quantum Dots
• Phase Breaking of Coherent Electron Waves in Dot Array Systems ( Quantum Dot Structures)
• The Role of Electron Phase Coherence in Quantum Transport through Open Ballistic Cavities ( Quantum Dot Structures)
• Quantum Transport in Single and Multiple Quantum Dots ( Quantum Dot Structures)
• Carrier Transport in Nanodevices
• Trajectory Transition Due to Gate Depletion in Corrugation Gated Quantum Wires
• Carrier Transport in Nanoscale Structures
• Electron Wave Interference in Ballistic and Quasi-Ballistic Nanostructures
• Zero-Current Voltage Fluctuations in Quantum Dots at High Magnetic Fields
• Study of Scattering Processes in Quantum Wires by a Correlation Field Analysis of the Phase Coherent Interferences
• The Magnetic Field Dependent Characteristics of Conductance Fluctuations in Ballistic Quantum Dots
• Experimental Determination of the Conduction Width in Quasi Ballistic Wires
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• Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography
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• The Characteristics of Ion-Beam-Induced Spontaneous Etching of GaAs by Low-Energy Focused Ion Beam Irradiation
• Low Energy Focused Ion Beam System and Application to Low Damage Microprocess
• Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam excited Plasma(EBEP) System : Etching and Deposition Technology
• Magnetotransport in One-Dimensional Lateral Surface Superlattice Fabricated by Low-Energy Argon Ion Irradiation
• Single Particle Relaxation Times from Shubnikov-de Haas Oscillations in Antidot Structures
• Quantum dot transport of semiconducting single-wall carbon nanotubes
• 招待講演 Carbon nanotubes for quantum-dot devices
• 招待講演 Carbon nanotubes for quantum-dot devices
• Quantum Dot Formation in Single-Wall Carbon Nanotubes
• Quantum Dots in Carbon Nanotubes
• Characterization of Small Superconducting Rings and Its Possible Application to New Single Flux Quantum Devices
• Observation of Aharonov-Bohm Oscillations in the Magnetoresistance of a GaAs/AlGaAs Quantum Dot
• The Transmission Properties of Quantum Dots at High Magnetic Fields
• New Etching System with a Large Diameter Using Electron Beam Excited Plasma
• Comparative Studies between Ag-Sheathed YBa_2Cu_3O_y Wires and Sintered YBa_2Cu_3O_y
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• Enhancement of the 15.4 nm Line of the Lithiumlike Aluminum Recombining Plasma Laser using a Half Cavity
• Enhancement of Soft X-Ray Emission from Al Plasma by Pulse Train Laser Irradiation
• Observation of Soft X-Ray Amplified Spontaneous Emission in a Recombining Si Plasma Pumped by a Low-Power Laser
• Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System : Etching and Deposition Technology
• Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System
• Soft X-Ray Lasing in an Al Plasma Produced by a 6 J Laser
• New High Current Low Energy Ion Source
• Effect of Multipulse Waveform on Gains of Soft X-Ray Lines of Lithium-Like Aluminum Ions in Recombining Plasmas
• Debris from the Target of an X-Ray Laser System and the Effect on Cavity Mirrors
• Nonlinear Vibration of Liquid Droplet by Surface Acoustic Wave Excitation
• Fabrication of Submicron Contact Hole with a Focused Ion Beam
• Self-Developing Characteristics of Nitrocellulose Exposed to Ion Beams
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• Numerical Study of the Charge Distribution in a Quantum Wire Consisting a Junction of Wide-Narrow Geometry
• Ab Initio Cluster Study of the Interaction of Hydrogen with the GaAs(100) Surface
• Ballistic Electron Transport on Periodic and Quasi-Periodic Triangular Lattices of Scatterers : Micro/nanofabrication and Devices
• Ballistic Electron Transport on Periodic and Quasi-Periodic Triangular Lattices of Scatterers
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• Characterization of Y-Ba-Cu-O Thin Films on Metallic Substrates Using Co-Evaporation Technique
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• A Stable High-Brightness Electron Gun with Zr/W-tip for Nanometer Lithography. : I. Emission Properties in Schottky- and Thermal Field-Emission Regions
• Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams
• Variable Nonlinear Transfer Characteristics of MSLM

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