30 nm Line Fabrication on PMMA Resist by Fine Focused Be Ion Beam
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1984-04-20
著者
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Kim Pil
Riken The Institute Of Physical And Chemical Research
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Kim Pil
The Institute Of Physical And Chemical Research
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Namba Susumu
The Institute Of Physical And Chemical Research
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AOYAGI Yoshinobu
The Institute of Physical and Chemical Research
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Aoyagi Y
Interdisciplinary Graduate School Of Science & Engineering Tokyo Institute Of Technology
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Aoyagi Y
Inst. Physics And Chemical Res. (riken) Wako Jpn
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Shiokawa Takao
The Institute of Physical and Chemical Research Wako
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Toyoda Koichi
The Institute of Physical and Chemical Research Wako
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Nonoyama Shinji
Quantum Material Research Laboratory Frontier Research Program The Institute Of Physical And Chemica
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Sakamoto Toshitugu
Faculty Of Engineering Science Osaka University
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Kim P
Riken The Institute Of Physical And Chemical Research
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Namba S
Riken The Institute Of Physical And Chemical Research
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Toyoda Koichi
The Institute Of Physical And Chemical Research
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Namba S
Faculty Of Engineering Osaka University
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Shiokawa Takao
The Institute of Physical and Chemical Research
関連論文
- Characterization of GaAs and AlGaAs layers grown by laser atomic layer epitaxy
- New Fabrication Technique of Quantum Wire Structures with Dimensions Precisely Controlled by the CBE Method
- Effects of an Electric Field on the Decay Time of Luminescence from a GaAs/Ga_Al_As Multi-Quantum-Well Structure
- Transient Characteristics of Luminescence from GaAs/Ga_Al_As Multi-Quantum-Well Structure under Resonant Excitation
- Characteristics of the Time-Resolved Photoluminescence in Microcrystalline Si
- Effect of Electric Field on Transient Characteristics of Luminescence from GaAs/Ga_Al_As Multi-Quantum-Well Structure
- Temperature Dependence of Decay Time of Photoluminescence from GaAs/Ga_Al_As Multi Quantum Well Structures
- Transient Characteristics of Photoluminescence from GaAs/Ga_Al_As Single Quantum Well Structure
- Lifetime and diffusion coefficient of carriers in X-ray irradiated a-Si:H
- Determination of Reaction Constant of Exciton-Exciton Collision by Absorption Measurement
- High-Power Subpicosecond Pulse Generation in Near-IR Region by Cavity-Dumped Passive and Synchronous Hybrid Mode-Locking System
- Tunable Subpicosecond Pulse Generation in near IR Region from OX-725 Dye Laser by Passive and Synchronous Hybrid Modelocking Method
- A Tunable Picosecond UV Dye Laser Pumped by the Third Harmonic of a Nd: YAG Laser
- Preparation of High-T_c Superconducting Films by Q-Switched YAG Laser Sputtering : Electrical Properties of Condensed Matter
- Group Velocity and Dispersion Relation of Polariton Wave-Packet in CdS
- 31a-YJ-11 Many-body effects in GaN quantum dots
- Flash-Lamp-Pumped Tunable Ti:BeAl_2O_4 Laser
- Passive Mode Locking of a Flashlamp-Pumped Ti:Sapphire Laser
- Flash Lamp Pumped Tunable Forsterite Laser
- Optical Properties and Lasing of Ti^ Doped BeAl_2O_4
- Magnetic Field in Direct- and Indirect-Gap Semiconductor Quantum Dots
- Preparation and Photoluminescence of High-Purity Homoepitaxial CdS Layers
- Optical, Electrical and Structural Investigations of the Transition from Amorphous to Microcrystalline Silicon
- Observation of Direct Transitions in Silicon Nanocrystallites
- Violet and Blue Light Emissions from Nanocrystalline Silicon Thin Films
- Effect of a Magnetic Field on the Excitonic Luminescence Decay Time in a GaAs-Al_xGa_As Quantum Well
- Formation of Hg_Cd_xTe by Ion Implantation
- Modeling of Electron Transport in Corrugated Quantum Wires
- Ballistic Weak Localization and Wave Function Scarring in Quantum Wires
- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation : Microfabrication and Physics
- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation
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- 200 kV Mass-Separated Fine Focused Ion Beam Apparatus
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- Concentration Profiles of Nickel and Chromium Implanted in Mild Steel
- Near-Field Scanning Optical Microscopy of Quantum Dot Arrays
- Probing the Discrete Level Spectrum of Open Quantum Dots
- Phase Breaking of Coherent Electron Waves in Dot Array Systems ( Quantum Dot Structures)
- The Role of Electron Phase Coherence in Quantum Transport through Open Ballistic Cavities ( Quantum Dot Structures)
- Quantum Transport in Single and Multiple Quantum Dots ( Quantum Dot Structures)
- Carrier Transport in Nanodevices
- Trajectory Transition Due to Gate Depletion in Corrugation Gated Quantum Wires
- Carrier Transport in Nanoscale Structures
- Electron Wave Interference in Ballistic and Quasi-Ballistic Nanostructures
- Zero-Current Voltage Fluctuations in Quantum Dots at High Magnetic Fields
- Study of Scattering Processes in Quantum Wires by a Correlation Field Analysis of the Phase Coherent Interferences
- Quantum dot transport of semiconducting single-wall carbon nanotubes
- 招待講演 Carbon nanotubes for quantum-dot devices
- 招待講演 Carbon nanotubes for quantum-dot devices
- Quantum Dots in Carbon Nanotubes
- Characterization of Small Superconducting Rings and Its Possible Application to New Single Flux Quantum Devices
- Digital Etching Using KrF Excimer Laser: Approach to Atomic-Order-Controlled Etching by Photo Induced Reaction
- Isotope Scrambling Mechanisms of Chlorine LIS by an Ar Ion Laser Induced Reaction of Cl_2 with C_2Cl_4
- Isotope Shift and Absorption Spectrum of Chlorine Available for Laser Isotope Separation
- Study of Absorption Spectrum of Bromine Molecule for Laser Isotope Separation
- Measurement of Thermal Diffusivity by Laser Pulse
- Relation of Laser Induced Ion Energy to Laser Power
- Development and Applications of a Compact Electron Cyclotron Resonance Source : Etching
- Development and Applications of a Compact Electron Cyclotron Resonance Source
- The Irradiation Effects of an Oxygen Radical Beam on the Preparation of Superconducting Thin Films
- Composition Change of Indium Oxide Film by Triethylgallium Irradiation Prepared for In Situ Selective Epitaxy Use
- Thin Gallium Oxide Film Deposited in Vacuum for In Situ Process Use
- Enhancement of the 15.4 nm Line of the Lithiumlike Aluminum Recombining Plasma Laser using a Half Cavity
- Enhancement of Soft X-Ray Emission from Al Plasma by Pulse Train Laser Irradiation
- Observation of Soft X-Ray Amplified Spontaneous Emission in a Recombining Si Plasma Pumped by a Low-Power Laser
- Soft X-Ray Lasing in an Al Plasma Produced by a 6 J Laser
- Maskless Fabrication of High Quality DFB Laser Gratings by Laser Induced Chemical Etching
- Atomic Layer Epitaxy of AlAs Using Dimethylethylamine Alane
- Anti-Surfactant in III-Nitride Epitaxy : Quantum Dot Formation and Dislocation Termination
- Electron and Laser Beam Processing
- Beam Angle and Output Energy of Ruby Laser in External Mirror Alignment
- Study on Saturat Process by Anomalous Dispersion of Ruby Laser
- Stimulated Emission from Nd^ Glass
- The Surface Temperature of Metals Heated with Laser
- Highly Collimated Laser Beam from Tunable Distributed-Feedback Dye Laser
- Blazing of Holographic Grating by Ion Etching Technique
- Triggering Characteristics of TEA CO_2 Laser
- Internal Q-Switching in a CdS Laser Pumped by an Electron Beam
- A Transverse Electron Beam Source for the Excitation of CW Lasers
- Cold Jet Infrared Absorption Spectroscopy: The v_3 Band of UF_6
- Temperature Tuning of 4-Methylumbelliferone Dye Laser
- Crystallization of Vacuum-Deposited Indium Antimonide Films by the Electron Beam Zone-Melting Process
- Bi-Level Structures for Focused Ion Beam Using Maskless Ion Etching
- Wavelength Control of Thin Film DFB Laser by Changing Film Thickness
- Modulation of the Optical Guided Wave by UV Light Excitation
- Reaction Temperature of HgS
- UF6 Photodissociation through Measurement of Visible and Infrared Luminescence
- Formation of High Resistance Region in GaAs by Ga Focused-Ion-Beam Implantation
- Characteristics of the Time-Resolved Photoluminescence in Microcrystalline Si
- Thermal Conductivity of ThO2-UO2 System
- Reactive Species Produced by Laser Irradiation. The Reaction of CN Radicals with Hydrocarbons
- The Reaction of Water Vapor and Carbon Vapor Produced by Laser Irradiation
- Laser-induced Chemical Reactions. VI. On the Formation Processes of Acetylene
- Laser-induced Chemical Reactions. III. The Decomposition of Metal Salts of Carboxylic Acid and Selective Decomposition
- Laser-induced Chemical Reactions. IV. Reactions of Carbon Vapor with Hydrogen at Various Pressures
- The Decomposition of Organic Substances by Laser Heating