Composition Change of Indium Oxide Film by Triethylgallium Irradiation Prepared for In Situ Selective Epitaxy Use
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-10-15
著者
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AOYAGI Yoshinobu
The Institute of Physical and Chemical Research
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Aoyagi Y
Semiconductor Laboratory Riken The Institute For Physical And Chemical Research
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Aoyagi Y
Riren (the Institute Of Physical And Chemical Research)
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Aoyagi Y
The Institute Of Physical And Chemical Research
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Aoyagi Yoshinobu
Frontier Research Program Riken
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Aoyagi Yoshinobu
The Institute Of Physical And Chemical Research (riken):microelectronics R & D Center Chinese Ac
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OZASA Kazunari
The Institute of Physical and Chemical Research (RIKEN)
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YE Tianchun
o Tsukuba Research Consortium
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Ozasa K
The Institute Of Physical And Chemical Research (riken):structure And Functional Property Group Pres
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Aoyagi Y
Inst. Physical And Chemical Res. Riken Wako Jpn
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