Direct Observation of Self-Limiting Gallium Deposition on GaAs during Laser-Atomic Layer Epitaxial Processing

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-11-15

著者

• Sugano Takeshi

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• Aoyagi Yoshinobu

  Riren (the Institute Of Physical And Chemical Research)

• Aoyagi Y

  Inst. Physics And Chemical Res. (riken) Wako Jpn

• Aoyagi Y

  Semiconductor Laboratory Riken The Institute For Physical And Chemical Research

• Iwai Sohachi

  Riken (the Institute Of Physical And Chemical Research)

• SUGANO Takuo

  Frontier Research Program, The Institute of Physical and Chemical Research (RIKEN)

• AOYAGI Yoshinobu

  Frontier Research Program, The Institute of Physical and Chemical Research (RIKEN)

• Aoyagi Y

  Riren (the Institute Of Physical And Chemical Research)

• Meguro T

  Tohoku Univ. Sendai Jpn

• Aoyagi Y

  The Institute Of Physical And Chemical Research

• SIMKO Jeffry

  Frontier Research Program, RIKEN (The Institute of Physical and Chemical Research)

• MEGURO Takashi

  RIKEN (The Institute of Physical and Chemical Research)

• OZASA Kazunari

  RIKEN (The Institute of Physical and Chemical Research)

• HIRATA Akira

  School of Science and Engineering, Waseda University

• Aoyagi Yoshinobu

  Frontier Research Program Riken

• Aoyagi Yoshinobu

  The Institute Of Physical And Chemical Research (riken):microelectronics R & D Center Chinese Ac

• Simko Jeffry

  Frontier Research Program Riken (the Institute Of Physical And Chemical Research)

• Meguro T

  Hokkaido Central Agricultural Experiment Station

• Aoyagi Y

  Inst. Physical And Chemical Res. Riken Wako Jpn

• Sugano T

  Nanoelectronic Materials Laboratory Frontier Research Program Riken

• Hirata Akira

  School Of Science And Engineering Waseda University

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