New High Current Low Energy Ion Source
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-03-20
著者
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HARA Tamio
Toyota Technological Institute
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Aoyagi Y
Inst. Physics And Chemical Res. (riken) Wako Jpn
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Aoyagi Y
Semiconductor Laboratory Riken The Institute For Physical And Chemical Research
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Namba S
Japan Atomic Energy Res. Inst. Kyoto Jpn
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Namba Susumu
Riken The Institute Of Physical And Chemical Research
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Aoyagi Yoshinobu
Riken
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HAMAGAKI Manabu
RIKEN, The Institute of Physical and Chemical Research
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HARA Tamio
RIKEN, The Institute of Physical and Chemical Research
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Aoyagi Y
The Institute Of Physical And Chemical Research
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Namba Susumu
Research Center For Extreme Materials And Department Of Electrical Engineering Osaka University
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Hamagaki M
The Institute Of Physical And Chemical Research (riken)
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Hamagaki Manabu
Akashi Technical Institute Kawasaki Heavy Industries
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SANDA Atsuo
Faculty of Engineering, Saitama University
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Hamagaki Manabu
Riken
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Namba S
Riken The Institute Of Physical And Chemical Research
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Sanda Atsuo
Faculty Of Engineering Saitama University
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Namba S
Faculty Of Engineering Osaka University
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NAMBA Susumu
Research Center for Extreme Materials and Department of Electrical Engineering, Osaka University
関連論文
- Dotted-Array Plasma Production by Using a Line-Focusing Lens System with Segmented Prism Array for Compact X-ray Laser Experiments
- Demonstration of X-Ray Amplification in an X-Ray Laser Cavity Pumped by a Pulse-Train Yttrium Aluminium Garnet Laser
- Debris from High-Aspect-Ratio Rectangular Focused Laser Irradiation on a Tape Target Surface in an X-Ray Laser System
- Observation of Gain and Double-pass Amplification of Li-like Al Soft X-ray Transitions in a Recombining Plasma Pumped by a Pulse-train YAG Laser
- Characterization of GaAs and AlGaAs layers grown by laser atomic layer epitaxy
- New Fabrication Technique of Quantum Wire Structures with Dimensions Precisely Controlled by the CBE Method
- Reflow of PSG Layers by Halogen Lamp Short Duration Heating Technique
- Contact Resistance of Al/Si Ohmic Electrodes Formed by Rapid Lamp Sintering.
- Measurements of Spatial Coherence of Recombination X-Ray Laser
- Magnetic Field in Direct- and Indirect-Gap Semiconductor Quantum Dots
- Laser Surface Cleaning in Air: Mechanisms and Applications
- Growth of Ultrathin Silver Films by Excimer-Laser-Induced Decomposition of Silver Acetate in Air
- Excimer-Laser Removal of SiO_2 Patterns from GaAs Substrates
- Effects of Heat Treatment on the Sensitivity of Warm Carrier Devices for CH_3OH Laser Radiation
- Thin-Film Long-Wire Antenna for 10.6 μm CO_2 Laser Radiation
- Optical, Electrical and Structural Investigations of the Transition from Amorphous to Microcrystalline Silicon
- Observation of Direct Transitions in Silicon Nanocrystallites
- Violet and Blue Light Emissions from Nanocrystalline Silicon Thin Films
- Effect of a Magnetic Field on the Excitonic Luminescence Decay Time in a GaAs-Al_xGa_As Quantum Well
- Modeling of Electron Transport in Corrugated Quantum Wires
- Ballistic Weak Localization and Wave Function Scarring in Quantum Wires
- Low-Energy Ion-Beam Irradiation Effects on Two-Dimensional Electron Gas in Modulation-Doped AlGaAs/ GaAs Heterostructure : Micro/nanofabrication and Devices
- Low-Energy Ion-Beam Irradiation Effects on Two-Dimensional Electron Gas in Modulation-Doped AlGaAs/GaAs Heterostructure
- Anderson Localization and Universal Conductance Fluctuations with Spin-Orbit Interactions in δ-Doped GaAs Films and Wires
- Phase Coherence Length in Planar Doped Thin GaAs Wires Fabricated by Ion Beam Etching : Microfabrication and Physics
- Phase Coherence Length in Planar Doped Thin GaAs Wires Fabricated by Ion Beam Etching
- Three-Dimensional Analysis of Locally Implanted Atoms by MeV Helium Ion Microprobe
- Is There a Magnetic-Field-Induced Breakdown in the Universality of Conductance Fluctuations?
- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation : Microfabrication and Physics
- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation
- 40 nm Width Structure of GaAs Fabricated by Fine Focused Ion Beam Lithography and Chlorine Reactive Ion Etching : Techniques, Instrumentations and Measurement
- 30 nm Line Fabrication on PMMA Resist by Fine Focused Be Ion Beam
- Electronic Properties of Polysilane Calculated with the Real-Time Real-Space Higher-Order Finite-Difference Method
- Fast Algorithm for Calculating Two-Photon Absorption Spectra by Real-Time Real-Space Higher-Order Finite-Difference Method
- Probing the Discrete Level Spectrum of Open Quantum Dots
- Phase Breaking of Coherent Electron Waves in Dot Array Systems ( Quantum Dot Structures)
- The Role of Electron Phase Coherence in Quantum Transport through Open Ballistic Cavities ( Quantum Dot Structures)
- Quantum Transport in Single and Multiple Quantum Dots ( Quantum Dot Structures)
- Carrier Transport in Nanodevices
- Trajectory Transition Due to Gate Depletion in Corrugation Gated Quantum Wires
- Carrier Transport in Nanoscale Structures
- Electron Wave Interference in Ballistic and Quasi-Ballistic Nanostructures
- Zero-Current Voltage Fluctuations in Quantum Dots at High Magnetic Fields
- Study of Scattering Processes in Quantum Wires by a Correlation Field Analysis of the Phase Coherent Interferences
- The Magnetic Field Dependent Characteristics of Conductance Fluctuations in Ballistic Quantum Dots
- Experimental Determination of the Conduction Width in Quasi Ballistic Wires
- Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography : Micro/nanofabrication and Devices
- Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography
- Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam excited Plasma(EBEP) System : Etching and Deposition Technology
- Quantum dot transport of semiconducting single-wall carbon nanotubes
- 招待講演 Carbon nanotubes for quantum-dot devices
- 招待講演 Carbon nanotubes for quantum-dot devices
- Quantum Dot Formation in Single-Wall Carbon Nanotubes
- Quantum Dots in Carbon Nanotubes
- Characterization of Small Superconducting Rings and Its Possible Application to New Single Flux Quantum Devices
- Observation of Aharonov-Bohm Oscillations in the Magnetoresistance of a GaAs/AlGaAs Quantum Dot
- The Transmission Properties of Quantum Dots at High Magnetic Fields
- Interference Area of Universal Conductance Fluctuations in Narrow GaAs/AlGaAs Wires
- Conductance Fluctuations in GaAs/AlGaAs Narrow Wires in Quasi-Ballistic Regime
- Digital Etching Using KrF Excimer Laser: Approach to Atomic-Order-Controlled Etching by Photo Induced Reaction
- New Etching System with a Large Diameter Using Electron Beam Excited Plasma
- Direct Observation of Self-Limiting Gallium Deposition on GaAs during Laser-Atomic Layer Epitaxial Processing
- Reversible Reconstruction Changes in GaAs Surfaces due to Hydrogen Termination
- Study of Surface Processes in the Digital Etching of GaAs
- Radical-Beam-Induced Surface Reaction Processes of Porous Si
- Development and Applications of a Compact Electron Cyclotron Resonance Source : Etching
- Development and Applications of a Compact Electron Cyclotron Resonance Source
- The Irradiation Effects of an Oxygen Radical Beam on the Preparation of Superconducting Thin Films
- Transition from Semi-Classical to Quantum Transport in Quasi-Ballistic Wires
- Composition Change of Indium Oxide Film by Triethylgallium Irradiation Prepared for In Situ Selective Epitaxy Use
- Thin Gallium Oxide Film Deposited in Vacuum for In Situ Process Use
- Alignment Control of a Liquid Crystal on a Photosensitive Polyvinylalcohol Film
- Comparative Studies between Ag-Sheathed YBa_2Cu_3O_y Wires and Sintered YBa_2Cu_3O_y
- Enhancement of the 15.4 nm Line of the Lithiumlike Aluminum Recombining Plasma Laser using a Half Cavity
- Enhancement of Soft X-Ray Emission from Al Plasma by Pulse Train Laser Irradiation
- Observation of Soft X-Ray Amplified Spontaneous Emission in a Recombining Si Plasma Pumped by a Low-Power Laser
- Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System : Etching and Deposition Technology
- Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System
- Soft X-Ray Lasing in an Al Plasma Produced by a 6 J Laser
- New High Current Low Energy Ion Source
- Correlation Field Analysis of the Influence of Device Geometry and Bulk Disorder on Electron Interference in Quantum Wires
- Effect of Multipulse Waveform on Gains of Soft X-Ray Lines of Lithium-Like Aluminum Ions in Recombining Plasmas
- Debris from the Target of an X-Ray Laser System and the Effect on Cavity Mirrors
- Shubnikov-de Haas Oscillations in a Narrow GaAs/AlGaAs Wire
- Aperiodic Conductance Fluctuations in a Narrow GaAs/AlGaAs Wire
- Contactless Measurement of Young's Modulus Using Laser Beam Excitation and Detection of Vibration of Thin-Film Microresonators
- Self-Aligned Formation of Porous Silicon Membranes Using Si Diaphragm Structures : Instrumentation, Measurement, and Fabrication Technology
- Low Temperature Magnetoresistance of a Quasi-Ballistic Narrow Wire Confined by Split Metal Gates
- Size Dependence of Universal Conductance Fluctuations in Narrow N^+ -GaAs Wires : II. LOW TEMPERATURE PROPERTIES OF SOLIDS : Localization, Mesoscopic Systems
- Dynamic Behavior of 30-ps Pulsed-Laser Annealing in Ion-Implanted Si
- Carbon Ion Implantation in GaAs
- Thermal Stability in Al/Ti/GaAs Schottky Barrier
- A Transverse Electron Beam Source for the Excitation of CW Lasers
- Growth Rate and Crystallinity of Nanocrystalline Silicon Film Grown by Electron Beam Excited Plasma Chemical Vapor Deposition
- Numerical Study of the Charge Distribution in a Quantum Wire Consisting a Junction of Wide-Narrow Geometry
- Ab Initio Cluster Study of the Interaction of Hydrogen with the GaAs(100) Surface
- Maskless Ion Implantation of Cerium by Focused Ion Beam : Techniques, Instrumentations and Measurement
- Characterization of Y-Ba-Cu-O Thin Films on Metallic Substrates Using Co-Evaporation Technique
- Application of a Ferroelectric Liquid-Crystal Cell to an Electric Field Sensor
- Variable Nonlinear Transfer Characteristics of MSLM