HAMAGAKI Manabu | RIKEN, The Institute of Physical and Chemical Research
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概要
関連著者
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HARA Tamio
Toyota Technological Institute
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Aoyagi Y
Inst. Physics And Chemical Res. (riken) Wako Jpn
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Aoyagi Yoshinobu
Riken
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HAMAGAKI Manabu
RIKEN, The Institute of Physical and Chemical Research
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HARA Tamio
RIKEN, The Institute of Physical and Chemical Research
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Hamagaki M
The Institute Of Physical And Chemical Research (riken)
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Hamagaki Manabu
Akashi Technical Institute Kawasaki Heavy Industries
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Hamagaki Manabu
Riken
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Aoyagi Y
Semiconductor Laboratory Riken The Institute For Physical And Chemical Research
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Hara T
Toyota Technological Inst. Nagoya Jpn
著作論文
- 40 nm Width Structure of GaAs Fabricated by Fine Focused Ion Beam Lithography and Chlorine Reactive Ion Etching : Techniques, Instrumentations and Measurement
- Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam excited Plasma(EBEP) System : Etching and Deposition Technology
- Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System : Etching and Deposition Technology
- Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System
- New High Current Low Energy Ion Source