Development and Applications of a Compact Electron Cyclotron Resonance Source : Etching
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-30
著者
-
AOYAGI Yoshinobu
The Institute of Physical and Chemical Research
-
Aoyagi Yoshinobu
Riren (the Institute Of Physical And Chemical Research)
-
Morikawa T
Toyo Univ. Saitama Jpn
-
Morikawa T
Communications Res. Lab. Tokyo Jpn
-
Morikawa Takitaro
Faculty Of Engineering Toyo University
-
Aoyagi Y
Semiconductor Laboratory Riken The Institute For Physical And Chemical Research
-
Aoyagi Y
Riren (the Institute Of Physical And Chemical Research)
-
Aoyagi Y
The Institute Of Physical And Chemical Research
-
DEN Shoji
Irie Koken Co., Ltd.
-
KOMURO Shunji
Faculty of Engineering
-
Morikawa Takeshi
Toyota Central R & D Laboratories Inc.
-
Aoyagi Yoshinobu
Frontier Research Program Riken
-
Aoyagi Yoshinobu
The Institute Of Physical And Chemical Research (riken):microelectronics R & D Center Chinese Ac
-
Den S
Irie Koken Co. Ltd.
-
Keeffe Patrick
Riken (the Institute Of Physical And Chemical Research):irie Koken Co. Ltd.
-
Aoyagi Y
Inst. Physical And Chemical Res. Riken Wako Jpn
-
Den Shoji
Irie Koken Co. Ltd.
関連論文
- Characterization of GaAs and AlGaAs layers grown by laser atomic layer epitaxy
- New Fabrication Technique of Quantum Wire Structures with Dimensions Precisely Controlled by the CBE Method
- Effects of an Electric Field on the Decay Time of Luminescence from a GaAs/Ga_Al_As Multi-Quantum-Well Structure
- Transient Characteristics of Luminescence from GaAs/Ga_Al_As Multi-Quantum-Well Structure under Resonant Excitation
- Characteristics of the Time-Resolved Photoluminescence in Microcrystalline Si
- Effect of Electric Field on Transient Characteristics of Luminescence from GaAs/Ga_Al_As Multi-Quantum-Well Structure
- Temperature Dependence of Decay Time of Photoluminescence from GaAs/Ga_Al_As Multi Quantum Well Structures
- Transient Characteristics of Photoluminescence from GaAs/Ga_Al_As Single Quantum Well Structure
- Lifetime and diffusion coefficient of carriers in X-ray irradiated a-Si:H
- Determination of Reaction Constant of Exciton-Exciton Collision by Absorption Measurement
- High-Power Subpicosecond Pulse Generation in Near-IR Region by Cavity-Dumped Passive and Synchronous Hybrid Mode-Locking System
- Tunable Subpicosecond Pulse Generation in near IR Region from OX-725 Dye Laser by Passive and Synchronous Hybrid Modelocking Method
- A Tunable Picosecond UV Dye Laser Pumped by the Third Harmonic of a Nd: YAG Laser
- Observation of a Visible Line Emission from RF and ECR Oxygen Plasmas
- Preparation of High-T_c Superconducting Films by Q-Switched YAG Laser Sputtering : Electrical Properties of Condensed Matter
- Group Velocity and Dispersion Relation of Polariton Wave-Packet in CdS
- 31a-YJ-11 Many-body effects in GaN quantum dots
- Magnetic Field in Direct- and Indirect-Gap Semiconductor Quantum Dots
- Laser Surface Cleaning in Air: Mechanisms and Applications
- Growth of Ultrathin Silver Films by Excimer-Laser-Induced Decomposition of Silver Acetate in Air
- Excimer-Laser Removal of SiO_2 Patterns from GaAs Substrates
- Optical, Electrical and Structural Investigations of the Transition from Amorphous to Microcrystalline Silicon
- Observation of Direct Transitions in Silicon Nanocrystallites
- Violet and Blue Light Emissions from Nanocrystalline Silicon Thin Films
- Effect of a Magnetic Field on the Excitonic Luminescence Decay Time in a GaAs-Al_xGa_As Quantum Well
- Production and Characterization of Heteroatom-encapsulated Metallofullerene, CaHo@C_
- Selective Extraction of Endohedral Metallofullerenes Using a Mixed Solvent of Triethylamine and Acetone
- Isolation and Characterization of a New Isomer of Ca@C_
- Beating of the Shubnikov-de Haas Oscillations in GaAs/AlGaAs Quantum-Dot Arrays
- Modeling of Electron Transport in Corrugated Quantum Wires
- Ballistic Weak Localization and Wave Function Scarring in Quantum Wires
- Is There a Magnetic-Field-Induced Breakdown in the Universality of Conductance Fluctuations?
- 30 nm Line Fabrication on PMMA Resist by Fine Focused Be Ion Beam
- Electronic Properties of Polysilane Calculated with the Real-Time Real-Space Higher-Order Finite-Difference Method
- Fast Algorithm for Calculating Two-Photon Absorption Spectra by Real-Time Real-Space Higher-Order Finite-Difference Method
- Near-Field Scanning Optical Microscopy of Quantum Dot Arrays
- Protection Organic Materials Against Ultraviolet Rays by Ion-Plated Zinc-Oxide Layer : Surfaces, Interfaces and Films
- Probing the Discrete Level Spectrum of Open Quantum Dots
- Phase Breaking of Coherent Electron Waves in Dot Array Systems ( Quantum Dot Structures)
- The Role of Electron Phase Coherence in Quantum Transport through Open Ballistic Cavities ( Quantum Dot Structures)
- Quantum Transport in Single and Multiple Quantum Dots ( Quantum Dot Structures)
- Carrier Transport in Nanodevices
- Trajectory Transition Due to Gate Depletion in Corrugation Gated Quantum Wires
- Carrier Transport in Nanoscale Structures
- Electron Wave Interference in Ballistic and Quasi-Ballistic Nanostructures
- Zero-Current Voltage Fluctuations in Quantum Dots at High Magnetic Fields
- Study of Scattering Processes in Quantum Wires by a Correlation Field Analysis of the Phase Coherent Interferences
- The Magnetic Field Dependent Characteristics of Conductance Fluctuations in Ballistic Quantum Dots
- Experimental Determination of the Conduction Width in Quasi Ballistic Wires
- Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography : Micro/nanofabrication and Devices
- Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography
- Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam excited Plasma(EBEP) System : Etching and Deposition Technology
- Photoconductivity in Semiconducting Single-Walled Carbon Nanotubes
- Quantum Dots and Their Tunnel Barrier in Semiconducting Single-Wall Carbon Nanotubes with a p-Type Behavior
- Fabrication of a Single-Electron Inverter in Single-Wall Carbon Nanotubes
- Quantum dot transport of semiconducting single-wall carbon nanotubes
- 招待講演 Carbon nanotubes for quantum-dot devices
- 招待講演 Carbon nanotubes for quantum-dot devices
- Quantum Dot Formation in Single-Wall Carbon Nanotubes
- Quantum Dots in Carbon Nanotubes
- Characterization of Small Superconducting Rings and Its Possible Application to New Single Flux Quantum Devices
- C_ Molecular Stumbling inside Single-Walled Carbon Nanotubes
- Digital Etching Using KrF Excimer Laser: Approach to Atomic-Order-Controlled Etching by Photo Induced Reaction
- New Etching System with a Large Diameter Using Electron Beam Excited Plasma
- Direct Observation of Self-Limiting Gallium Deposition on GaAs during Laser-Atomic Layer Epitaxial Processing
- Reversible Reconstruction Changes in GaAs Surfaces due to Hydrogen Termination
- Study of Surface Processes in the Digital Etching of GaAs
- XANES Analysis of Optical Activation Process of Er in Si:Er2O3 Thin Film:Electronic and Structural Modifications around Er (Proceedings of the Second International Conference on SRMS(Synchrotron Radiation in Materials Science)(2))
- Radical-Beam-Induced Surface Reaction Processes of Porous Si
- Development and Applications of a Compact Electron Cyclotron Resonance Source : Etching
- Development and Applications of a Compact Electron Cyclotron Resonance Source
- The Irradiation Effects of an Oxygen Radical Beam on the Preparation of Superconducting Thin Films
- Transition from Semi-Classical to Quantum Transport in Quasi-Ballistic Wires
- Composition Change of Indium Oxide Film by Triethylgallium Irradiation Prepared for In Situ Selective Epitaxy Use
- Thin Gallium Oxide Film Deposited in Vacuum for In Situ Process Use
- Alignment Control of a Liquid Crystal on a Photosensitive Polyvinylalcohol Film
- Rietveld Analysis and Maximum Entropy Method of Powder Diffraction for Bundles of Single-Walled Carbon Nanotubes(Condensed Matter : Structure, Mechanical and Thermal Properties)
- Effect of Amines on Single-Walled Carbon Nanotubes in Organic Solvents : Control of Bundle Structures
- Photocatalytic Degradation of Formaldehyde and Toluene Mixtures in Air with a Nitrogen-doped TiO_2 Photocatalyst
- Band-Gap Narrowing of Titanium Dioxide by Nitrogen Doping : Optical Properties of Condensed Matter
- Enhancement of the 15.4 nm Line of the Lithiumlike Aluminum Recombining Plasma Laser using a Half Cavity
- Enhancement of Soft X-Ray Emission from Al Plasma by Pulse Train Laser Irradiation
- Observation of Soft X-Ray Amplified Spontaneous Emission in a Recombining Si Plasma Pumped by a Low-Power Laser
- Soft X-Ray Lasing in an Al Plasma Produced by a 6 J Laser
- Maskless Fabrication of High Quality DFB Laser Gratings by Laser Induced Chemical Etching
- Atomic Layer Epitaxy of AlAs Using Dimethylethylamine Alane
- Anti-Surfactant in III-Nitride Epitaxy : Quantum Dot Formation and Dislocation Termination
- Influencs of Surface V/III Ratio on the Film Quality during the GaN Growth in Gas-Source Molecular Beam Epitaxy
- Highly Collimated Laser Beam from Tunable Distributed-Feedback Dye Laser
- Blazing of Holographic Grating by Ion Etching Technique
- Formation of Single-wall Carbon Nanotubes by Using Porous Glass
- Purification of Single-Wall Carbon Nanotubes Synthesized from Alcohol by Catalytic Chemical Vapor Deposition
- Phase Transition in Confined Water Inside Carbon Nanotubes(Cross-disciplinary Physics and Related Areas of Science and Technology)
- Temperature Tuning of 4-Methylumbelliferone Dye Laser
- Photoluminescence Intensity Enhancement due to Screening of Piezoelectric Field in Si-Doped G227aN/AlGaN Single-Quantum-Wells
- Wavelength Control of Thin Film DFB Laser by Changing Film Thickness
- Purification of Single-Wall Carbon Nanotubes Synthesized from Alcohol by Catalytic Chemical Vapor Deposition
- Characteristics of the Time-Resolved Photoluminescence in Microcrystalline Si
- Soft X-ray lasing in Al plasma produced by a low power laser.
- Zinc-Oxide Film Synthesized by ECR Oxygen Plasma