Observation of a Visible Line Emission from RF and ECR Oxygen Plasmas
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-11-20
著者
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Komuro Shuji
Department Of Electrical Engineering Faculty Of Engineering Toyo University
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SAKAMOTO Yuichi
Department of Electrical Engineering, Faculty of Engineering, Toyo University
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KOKAI Hideki
Department of Electrical Engineering, Faculty of Engineering, Toyo University
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UCHIYAMA Tomoo
Department of Electrical Engineering, Faculty of Engineering, Toyo University
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KASHIWAGI Kunihiro
Department of Electrical Engineering, Faculty of Engineering, Toyo University
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MORIKAWA Takitaro
Department of Electrical Engineering, Faculty of Engineering, Toyo University
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MURAYAMA Yoichi
Department of Electrical Engineering, Faculty of Engineering, Toyo University
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Morikawa T
Toyo Univ. Saitama Jpn
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Morikawa T
Communications Res. Lab. Tokyo Jpn
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Murayama Yoichi
Department Of Electrical Engineering Faculty Of Engineering Toyo University
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Murayama Yoichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Toyo University
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Kokai H
Toyo Univ. Saitama Jpn
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Kokai Hideki
Department Of Electrical And Electronic Engineering Faculty Of Engineering Toyo University
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Uchiyama T
Nec Corp. Kanagawa Jpn
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Morikawa Takitaro
Department Of Electrical Engineering Faculty Of Engineering Toyo University
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Kashiwagi Kunihiro
Toyo University
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Kashiwagi Kunihiro
Department Of Applied Chemistry Faculty Of Engineering Toyo University
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Morikawa Takeshi
Toyota Central R & D Laboratories Inc.
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Uchiyama Takayuki
Ulsi Device Development Laboratories Nec Corporation
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Murayama Y
Toyo Univ. Saitama Jpn
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Sakamoto Y
Department Of Applied Chemistry Tokyo Metropolitan University
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Sakamoto Yuichi
Department of Applied Chemistry and Institute of Colloid and Interface Science, Science University of Tokyo
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