Oxygenation Process of Ti-O Films Formed by Reactive Ion Plating : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-05-01
著者
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KOKAI Hideki
Department of Electrical Engineering, Faculty of Engineering, Toyo University
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KASHIWAGI Kunihiro
Department of Electrical Engineering, Faculty of Engineering, Toyo University
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Kokai Hideki
Department Of Electrical And Electronic Engineering Faculty Of Engineering Toyo University
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Kashiwagi Kunihiro
Department Of Applied Chemistry Faculty Of Engineering Toyo University
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OUMI Kenichi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyo University
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MURAYAMA Youichi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Toyo University
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Oumi Kenichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Toyo University
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Murayama Youichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Toyo University
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- Oxygenation Process of Ti-O Films Formed by Reactive Ion Plating : Surfaces, Interfaces, and Films
- Optical Thin Film Coating Having High Damage Resistance in Near-Stoichiometric MgO-Doped LiTaO3