Decarbonization by Using ECR Plasma : Nuclear Science, Plasmas and Electric Descharges
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概要
- 論文の詳細を見る
Decarbonization rates were measured by the use of ECR plasmas of H_2 or O_2. The rates are 2.0×10^<16> m^<-2>s<-1> for H_2 and 2.4×10^<18> m^<-2>s^<-1> for O_2 at the same pressure of 1.6×10^<-2> Pa. The rate for O_2 is two orders of magnitude higher than that for H_2. these results are analyzed depending on the equilibrium theory and the processing of decarbonization can be explained.
- 社団法人応用物理学会の論文
- 1988-04-20
著者
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Kokai Hideki
Faculty Of Engineering Tokyo University
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OYAMA Hitoshi
The Institute of Physical and Chemical Research
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SAKAMOTO Yuichi
The Institute of Physical and Chemical Research
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Oyama Hisashi
The Institute Of Physical And Chemical Research(riken)
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ISHIBE Yukio
The Institute of Physical and Chemical Research
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Sakamoto Y
Department Of Applied Chemistry Tokyo Metropolitan University
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Ishibe Y
The Institute Of Physical And Chemical Research
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